ASML Netherlands B.V.

SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTURE OF CHARGING DYNAMICS

ELECTRON-OPTICAL ELEMENT

A FIBER MANUFACTURING INTERMEDIATE PRODUCT AND METHOD OF PRODUCING PHOTONIC CRYSTAL FIBERS

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD

POSITION MEASUREMENT SYSTEM AND LITHOGRAPHIC APPARATUS

METHOD FOR IMPROVING CONSISTENCY IN MASK PATTERN GENERATION

MULTISCALE PHYSICAL ETCH MODELING AND METHODS THEREOF

OPTICAL SYSTEM FOR METROLOGY

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD

ALIGNMENT OF ELECTRON-OPTICAL ELEMENTS

CLEANING A PORTION OF A LITHOGRAPHY APPARATUS

POSITIONING SYSTEM, LITHOGRAPHIC TOOL AND METHOD FOR POSITIONING A MOVEABLE OBJECT USING A POSITIONING SYSTEM

MACHINE LEARNING BASED IMAGE GENERATION FOR MODEL BASE ALIGNMENTS

SOURCE OPTIMIZATION FOR MITIGATING MASK ERROR IMPACT

HOLLOW-CORE PHOTONIC CRYSTAL FIBER BASED BROADBAND RADIATION GENERATOR

ELECTRON-OPTICAL MODULE

SIMULATION MODEL STABILITY DETERMINATION METHOD

LITHOGRAPHIC APPARATUS STAGE COUPLING

TUNABLE OPTICAL SYSTEM

Method and Device for Machining a Wafer-Holding Device for a Wafer Lithography Process

DEFECT MAP BASED D2D ALIGNMENT OF IMAGES FOR MACHINE LEARNING TRAINING DATA PREPARATION

SIMULATION-ASSISTED METHODS AND SOFTWARE TO GUIDE SELECTION OF PATTERNS OR GAUGES FOR LITHOGRAPHIC PROCESSES

METHOD OF TILT METROLOGY AND ASSOCIATED APPARATUSES

RADIATION SOURCE MODULE AND LITHOGRAPHIC APPARATUS

METHOD TO DETERMINE AN ABSOLUTE POSITION OF AN OBJECT, INTERFEROMETER SYSTEM, PROJECTION SYSTEM AND LITHOGRAPHIC APPARATUS

PHOTO-ELECTRICAL EVOLUTION DEFECT INSPECTION

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD

ELECTROSTATIC CLAMP WITH A STRUCTURED ELECTRODE BY POST BOND STRUCTURING

INSPECTION SYSTEMS USING METASURFACE AND INTEGRATED OPTICAL SYSTEMS FOR LITHOGRAPHY

SYSTEMS AND METHODS FOR PREDICTING POST-ETCH STOCHASTIC VARIATION

MIRROR LAYER AND MIRROR FOR A LITHOGRAPHIC APPARATUS

PARTICLE TRANSFER APPARATUS AND METHODS

LITHOGRAPHIC APPARATUS AND METHOD

AN ILLUMINATION MODULE FOR A METROLOGY DEVICE

SYSTEMS AND METHODS FOR FOCUSING CHARGED-PARTICLE BEAMS

A PATTERNING DEVICE VOLTAGE BIASING SYSTEM FOR USE IN EUV LITHOGRAPHY

METHOD AND APPARATUS FOR CONTROLLING A LITHOGRAPHIC APPARATUS, AND A LITHOGRAPHIC APPARATUS

METHOD FOR TRAINING OR USING A PROCESS MODEL FOR DETERMINING A PATTERN IN A PATTERNING PROCESS

LITHOGRAPHIC APPARATUS, METROLOGY SYSTEMS FOR CONTROLLING OPTICAL ABERRATIONS, AND METHOD THEREOF

OBJECT TABLE, STAGE APPARATUS, HOLDING METHOD AND LITHOGRAPHIC APPARATUS

METHOD AND APPARATUS TO DETERMINE A PATTERNING PROCESS PARAMETER

METHOD OF CONTROLLING A PATTERNING PROCESS, DEVICE MANUFACTURING METHOD

PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

DESIGN FOR MULTIPLE OFF-AXIS ILLUMINATION BEAMS FOR WAFER ALIGNMENT SENSOR

CONTROL METHOD AND CONTROL SYSTEM FOR CONTROLLING A POSITION OF AN OBJECT WITH AN ELECTROMAGNETIC ACTUATOR

METHOD, APPARATUS, AND SYSTEM FOR DYNAMICALLY CONTROLLING AN ELECTROSTATIC CHUCK DURING AN INSPECTION OF WAFER

SYSTEMS AND METHODS OF ENERGY DISCRIMINATION OF BACKSCATTERED CHARGED-PARTICLES

METHOD FOR GENERATING PATTERNING DEVICE PATTERN AT PATCH BOUNDARY

CHARGED PARTICLE OPTICAL DEVICE, OBJECTIVE LENS ASSEMBLY, DETECTOR, DETECTOR ARRAY, AND METHODS

SYSTEM AND METHOD FOR DETECTING PARTICLES WITH A DETECTOR DURING INSPECTION

CALIBRATION OF DIGITAL ANALOG CONVERTER TO CONTROL DEFLECTORS IN CHARGED PARTICLE BEAM SYSTEM

SYSTEM AND METHOD FOR IMAGE RESOLUTION CHARACTERIZATION

SYSTEM AND METHOD FOR GENERATING PREDICTIVE IMAGES FOR WAFER INSPECTION USING MACHINE LEARNING

CHARGED PARTICLE APPARATUS

SCANNING ELECTRON MICROSCOPY (SEM) BACK-SCATTERING ELECTRON (BSE) FOCUSED TARGET AND METHOD

CLASSIFYING PRODUCT UNITS

FLUSHING SYSTEM AND METHOD FOR A LITHOGRAPHIC APPARATUS

PROJECTION SYSTEM CONTROL

METHOD AND APPARATUS FOR BONDING SUBSTRATES

HIGH-THROUGHPUT LOAD LOCK CHAMBER

PARAMETERIZED INSPECTION IMAGE SIMULATION

HOLOGRAPHIC METROLOGY APPARATUS AND METHOD

EUV RADIATION BEAM POWER REDUCTION

ILLUMINATION ADJUSTMENT APPARATUSES AND LITHOGRAPHIC APPARATUSES

METHOD FOR MONITORING PROPER FUNCTIONING OF ONE OR MORE COMPONENTS OF A LITHOGRAPHY SYSTEM

TUNABLE OPTICAL SYSTEM

CONTAMINATION CONTROL

POSITIONING SYSTEM FOR AN OPTICAL ELEMENT OF A METROLOGY APPARATUS

SENSOR MODULE, ILLUMINATOR, METROLOGY DEVICE AND ASSOCIATED METROLOGY METHOD

FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS

METHOD FOR TRAINING MACHINE LEARNING MODEL TO DETERMINE OPTICAL PROXIMITY CORRECTION FOR MASK

MACHINE LEARNING BASED SUBRESOLUTION ASSIST FEATURE PLACEMENT

SYSTEMS FOR PATH COMPENSATION WITH A MOVING OBJECTIVE

METHOD OF FORMING A PATTERNED LAYER OF MATERIAL, APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL

METHOD FOR RULE-BASED RETARGETING OF TARGET PATTERN

METROLOGY METHOD AND ASSOCIATED METROLOGY DEVICE

SYSTEMS AND METHODS OF DEFECT DETECTION BY VOLTAGE CONTRAST IMAGING

ELECTRON-OPTICAL ASSEMBLY

METHODS OF MITIGATING CROSSTALK IN METROLOGY IMAGES

MODE CONTROL OF PHOTONIC CRYSTAL FIBER BASED BROADBAND RADIATION SOURCES

METHOD FOR CALIBRATING SIMULATION PROCESS BASED ON DEFECT-BASED PROCESS WINDOW

INFERENCE MODEL TRAINING

MODELLING OF MULTI-LEVEL ETCH PROCESSES

OPTICAL ALIGNMENT SYSTEM AND METHOD

FLUID DISPENSING SYSTEM AND METHOD

CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS

PICTURE MODE RESOLUTION ENHANCEMENT FOR E-BEAM DETECTOR

ISOLATING SPACER FOR ELECTRON-OPTICAL ASSEMBLY

TRAINING A MACHINE LEARNING MODEL TO GENERATE MRC AND PROCESS AWARE MASK PATTERN

METROLOGY METHOD AND ASSOCIATED METROLOGY DEVICE

SINGLE PAD OVERLAY MEASUREMENT

ELECTROLYZER WITH DYNAMIC MEMBRANE

DROPLET GENERATOR NOZZLE

MECHATRONIC SYSTEM CONTROL METHOD, LITHOGRAPHIC APPARATUS CONTROL METHOD AND LITHOGRAPHIC APPARATUS

A MEMBRANE AND ASSOCIATED METHOD AND APPARATUS

CONFIGURABLE PRINTED OPTICAL ROUTING FOR PARALLEL OPTICAL DETECTION

IDENTIFICATION OF HOT SPOTS OR DEFECTS BY MACHINE LEARNING

SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER