Akitoshi HARADA

City:

Miyagi

Country:

Japan

Published Applications:

Last publication date:

2017-11-30

Top Assignees for applications by Akitoshi HARADA

The entities that hold a legal rights for patent applications filed by inventor HARADA Akitoshi:

TOKYO ELECTRON LIMITED 7 Tokyo, Japan
Tokyo Electron Limited 1 Minato-ku, Tokyo, Japan

Recent patent applications by HARADA Akitoshi

Akitoshi HARADA from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2017-11-30

US20170347442A1

Electricity

Plasma processing apparatus and particle adhesion preventing method

#2 | 2016-10-27

US20160315005A1

Electricity

Plasma processing method and plasma processing apparatus

#3 | 2016-07-07

US20160196957A1

Electricity

Plasma processing method

#4 | 2015-08-13

US20150228458A1

Electricity

Plasma processing method and plasma processing apparatus

#5 | 2015-08-06

US20150221522A1

Electricity

Plasma processing method and plasma processing apparatus

#6 | 2015-06-18

US20150170891A1

Electricity

PARTICLE BACKFLOW PREVENTING PART AND SUBSTRATE PROCESSING APPARATUS

#7 | 2015-04-30

US20150114930A1

Electricity

Plasma processing method and plasma processing apparatus

#8 | 2015-01-01

US20150004794A1

Electricity

Method of controlling temperature and plasma processing apparatus

#9 | 2014-12-25

US20140373867A1

Chemistry; metallurgy

CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS

InventorID:

1010750 ⎘