Assignee profile:

TOKYO ELECTRON LIMITED

City:

Tokyo

Country:

Japan

Published Applications:

10,533

Last publication date:

2026-10-08

Patent Grants:

8,608

Last grant date:

2026-10-06

Tokyo Electron Limited (TEL) is a Japanese electronics and semiconductor company headquartered in Tokyo, Japan. Founded in 1963, TEL is a leading supplier of semiconductor production equipment and services. It is also a major supplier of flat panel display production equipment and services. TEL's products are used in the manufacture of semiconductors, flat panel displays, and other electronic components. The company has operations in Japan, the United States, Europe, China, and other countries.

Quarterly TOKYO ELECTRON LIMITED Patent Applications

Top Inventors for applications by TOKYO ELECTRON LIMITED

These are the the leading inventors for applications assigned to TOKYO ELECTRON LIMITED:

Recent patent applications by TOKYO ELECTRON LIMITED

TOKYO ELECTRON LIMITED based in Tokyo, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2026-10-08
US20260314323A1
Electricity

SYNCHRONIZED MULTI-ARM ROBOT

#2 | 2026-10-08
US20260314302A1
Electricity

BONDING APPARATUS, BONDING SYSTEM, AND BONDING METHOD

#3 | 2026-10-08
US20260314298A1
Electricity

PREDICTION DEVICE AND ETCHING CONTROL SYSTEM

#4 | 2026-10-08
US20260311977A1
Electricity

MEASURING DEVICE, MEASURING METHOD, AND VACUUM PROCESSING APPARATUS

#5 | 2026-10-08
US20260311969A1
Electricity

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

#6 | 2026-10-08
US20260311967A1
Electricity

PLASMA PROCESSING APPARATUS, POWER SOURCE SYSTEM, AND PLASMA PROCESSING METHOD

#7 | 2026-10-08
US20260308752A1
Chemistry; metallurgy

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

#8 | 2026-10-01
US20260305258A1
Electricity

ADJUSTABLE CHUCK FOR WAFER BONDING

#9 | 2026-10-01
US20260305237A1
Electricity

SUBSTRATE PROCESSING SYSTEM, STORAGE MODULE, AND SUBSTRATE PROCESSING METHOD

#10 | 2026-10-01
US20260305226A1
Electricity

BONDING APPARATUS, BONDING SYSTEM, AND BONDING METHOD

#11 | 2026-10-01
US20260305197A1
Electricity

APPARATUS AND METHODS FOR PROCESSING BONDING SEMICONDUCTOR WAFERS

#12 | 2026-10-01
US20260304808A1
Electricity

BIPOLAR JUNCTION TRANSISTORS WITH NANOSHEET STRUCTURES AND METHODS FOR MANUFACTURING THE SAME

#13 | 2026-10-01
US20260302141A1
Electricity

SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS

#14 | 2026-10-01
US20260299211A1
Physics

SURFACE RELIEF GRATING PERFORMANCE AND COST ENHANCEMENTS FOR AUGMENTED REALITY APPLICATIONS

#15 | 2026-10-01
US20260297726A1
Chemistry; metallurgy

FILM DEPOSITION APPARATUS

#16 | 2026-09-24
US20260293625A1
Electricity

FORMATION OF LOW-TEMPERATURE AND HIGH-TEMPERATURE IN-SITU DOPED SOURCE AND DRAIN EPITAXY USING SELECTIVE HEATING FOR WRAP-AROUND CONTACT AND VERTICALLY STACKED DEVICE ARCHITECTURES

#17 | 2026-09-24
US20260293578A1
Electricity

SEPARATION APPARATUS, SEPARATION SYSTEM, AND SEPARATION METHOD

#18 | 2026-09-24
US20260290753A1
Electricity

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#19 | 2026-09-24
US20260289067A1
Physics

COMPUTER PROGRAM, INFORMATION PROCESSING APPARATUS, AND INFORMATION PROCESSING METHOD

#20 | 2026-09-17
US20260282846A1
Electricity

METHOD AND APPARATUS FOR HYBRID BONDING

#21 | 2026-09-17
US20260282843A1
Electricity

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#22 | 2026-09-17
US20260282827A1
Electricity

BONDING APPARATUS, BONDING SYSTEM, AND BONDING METHOD

#23 | 2026-09-17
US20260282825A1
Electricity

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM

#24 | 2026-09-17
US20260282802A1
Electricity

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TEMPERATURE CONTROL METHOD

#25 | 2026-09-17
US20260279743A1
Electricity

SUBSTRATE TRANSFER SYSTEM AND TRANSFER MODULE

#26 | 2026-09-17
US20260279742A1
Electricity

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

#27 | 2026-09-17
US20260279726A1
Electricity

ANTENNA FOR INDUCTIVELY COUPLED PLASMA EXCITATION, ANTENNA UNIT FOR INDUCTIVELY COUPLED PLASMA EXCITATION, AND PLASMA PROCESSING APPARATUS

#28 | 2026-09-17
US20260277960A1
Physics

INFORMATION PROCESSING METHOD, COMPUTER PROGRAM, AND INFORMATION PROCESSING APPARATUS

#29 | 2026-09-17
US20260277114A1
Physics

RECIPE TRANSFER OF PLASMA PROCESS USING PLASMA PARAMETERS DETERMINED BY VIRTUAL METROLOGY (VM) FEATURE SELECTION

#30 | 2026-09-17
US20260273658A1
Performing operations; transporting

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#31 | 2026-09-17
US20260273651A1
Performing operations; transporting

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#32 | 2026-09-10
US20260271644A1
Electricity

SUBSTRATE PROCESSING METHOD

#33 | 2026-09-10
US20260271642A1
Electricity

SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

#34 | 2026-09-10
US20260269196A1
Electricity

PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

#35 | 2026-09-10
US20260269183A1
Electricity

POWER SUPPLY SYSTEM, PLASMA PROCESSING APPARATUS, AND CONTROL METHOD

#36 | 2026-09-10
US20260267228A1
Physics

LITHOGRAPHY APPARATUS

#37 | 2026-09-10
US20260266562A1
Mechanical engineering

HEAT RECLAMATION MULTIPLE WASTE TANKS AT EACH STAGE

#38 | 2026-09-03
US20260262556A1
Electricity

METHOD AND APPARATUS FOR HYBRID BONDING

#39 | 2026-09-03
US20260260847A1
Electricity

PLASMA PROCESSING APPARATUS, POWER SUPPLY SYSTEM, AND CONTROL METHOD

#40 | 2026-09-03
US20260259879A1
Physics

INFORMATION PROCESSING METHOD, INFORMATION PROCESSING APPARATUS, AND COMPUTER PROGRAM

#41 | 2026-08-27
US20260255927A1
Electricity

SEMICONDUCTOR PRODUCTION APPARATUS AND INSTALLATION METHOD

#42 | 2026-08-27
US20260255915A1
Electricity

IN-VACUUM INTEGRATED METROLOGY SENSOR FOR THIN FILM DEPOSITION AND ETCHING APPLICATIONS

#43 | 2026-08-27
US20260255892A1
Electricity

SUBSTRATE LIQUID PROCESSING METHOD AND SUBSTRATE LIQUID PROCESSING APPARATUS

#44 | 2026-08-27
US20260253849A1
Electricity

SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS

#45 | 2026-08-27
US20260253201A1
Physics

VIRTUAL DISPENSE FLOW-RATE CALIBRATION AND CONTROL ON FLUID DISPENSING TOOLS

#46 | 2026-08-27
US20260253199A1
Physics

COMPUTER PROGRAM, INFORMATION PROCESSING METHOD, AND INFORMATION PROCESSING DEVICE

#47 | 2026-08-20
US20260247923A1
Electricity

LOCALIZED WAFER PRE-COOLING FOR HYPERSPECTRAL IMAGING SYSTEM AND METHOD FOR THREE-DIMENSION (3D) DEFECT ANALYSIS IN WAFERS

#48 | 2026-08-20
US20260247899A1
Electricity

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND COMPUTER-READABLE RECORDING MEDIUM

#49 | 2026-08-20
US20260247891A1
Electricity

SUBSTRATE PROCESSING METHOD

#50 | 2026-08-20
US20260245840A1
Electricity

SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROL DEVICE, AND TEMPERATURE CONTROL METHOD

#51 | 2026-08-20
US20260245839A1
Electricity

SUBSTRATE PROCESSING APPARATUS AND COOLING METHOD

#52 | 2026-08-13
US20260240057A1
Electricity

BONDING LAYER AND PROCESS

#53 | 2026-08-13
US20260239944A1
Electricity

DESIGN/TOPOGRAPHY BASED Z-HEIGHT & OPTICAL PROXIMITY CORRECTION (OPC) OPTIMIZATION & CO-OPTIMIZATION

#54 | 2026-08-13
US20260239913A1
Electricity

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#55 | 2026-08-13
US20260239911A1
Electricity

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MAINTAINING DRYING DEVICE IN SUBSTRATE PROCESSING APPARATUS

#56 | 2026-08-13
US20260235970A1
Physics

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#57 | 2026-08-13
US20260235967A1
Physics

SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND PROGRAM

#58 | 2026-08-13
US20260233380A1
Performing operations; transporting

MAINTENANCE SYSTEM AND MAINTENANCE METHOD

#59 | 2026-08-06
US20260231827A1
Electricity

SEQUENTIAL COMPLIMENTARY FET INCORPORATING BACKSIDE POWER DISTRIBUTION NETWORK THROUGH WAFER BONDING PRIOR TO FORMATION OF ACTIVE DEVICES

#60 | 2026-08-06
US20260231735A1
Electricity

IN-SITU HYBRID BONDING TEST MEASUREMENTS

#61 | 2026-08-06
US20260228574A1
Physics

INFORMATION PROCESSING METHOD, COMPUTER PROGRAM, AND INFORMATION PROCESSING APPARATUS

#62 | 2026-07-30
US20260223642A1
Electricity

SUBSTRATE SUPPORT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

#63 | 2026-07-30
US20260223629A1
Electricity

TRANSPORTER AND CONNECTION METHOD

#64 | 2026-07-30
US20260223625A1
Electricity

INTEGRATED METROLOGY FOR PROCESS CONTROLS IN WAFER BONDING SYSTEM

#65 | 2026-07-30 ✅ Patent 12,757,666 granted on 2026-10-06
US20260223620A1
Electricity

Mitigation of Capillary Pattern Collapse in Supercritical Dry

#66 | 2026-07-30
US20260223616A1
Electricity

METHODS FOR IMPROVING ETCH PROFILES OF SEMICONDUCTOR DEVICES

#67 | 2026-07-30
US20260221399A1
Electricity

SUBSTRATE SUPPORT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

#68 | 2026-07-30
US20260221398A1
Electricity

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

#69 | 2026-07-30
US20260221395A1
Electricity

UPPER ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS

#70 | 2026-07-23
US20260215248A1
Electricity

SIGNAL PATH ROUTING IN DIE-TO-DIE BONDED CIRCUITS

#71 | 2026-07-23
US20260215211A1
Electricity

DEVICE FOR SUBSTRATE PROCESSING SYSTEM AND COMPUTER-READABLE RECORDING MEDIUM

#72 | 2026-07-23
US20260215190A1
Electricity

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

#73 | 2026-07-23
US20260215187A1
Electricity

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#74 | 2026-07-23
US20260215186A1
Electricity

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

#75 | 2026-07-23
US20260213140A1
Electricity

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR OPERATING SUBSTRATE PROCESSING APPARATUS

#76 | 2026-07-23
US20260213133A1
Electricity

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

#77 | 2026-07-23
US20260213131A1
Electricity

PLASMA PROCESSING APPARATUS

#78 | 2026-07-23
US20260210476A1
Mechanical engineering

THERMAL INSULATION STRUCTURE FOR PIPE, PIPE HEATING SYSTEM, THERMAL INSULATION SHEET, AND METHOD OF INSTALLING THERMAL INSULATION STRUCTURE

#79 | 2026-07-16
US20260204525A1
Electricity

PLASMA PROCESSING APPARATUS AND ETCHING METHOD

#80 | 2026-07-16
US20260204516A1
Electricity

PLASMA PROCESSING APPARATUS

#81 | 2026-07-16
US20260201545A1
Chemistry; metallurgy

SUBSTRATE PROCESSING APPARATUS AND A SUBSTRATE PROCESSING METHOD

#82 | 2026-07-16
US20260198679A1
Human necessities

SUBSTRATE PROCESSING SYSTEM AND MOVABLE MAINTENANCE APPARATUS

#83 | 2026-07-09
US20260198268A1
Electricity

3D IMAGING BY LIQUID IMMERSION

#84 | 2026-07-09
US20260198263A1
Electricity

SYSTEM FOR ASSEMBLING COMPONENTS OF SUBSTRATE PROCESSING APPARATUS AND METHOD FOR ASSEMBLING COMPONENTS OF SUBSTRATE PROCESSING APPARATUS

#85 | 2026-07-09
US20260198256A1
Electricity

3D IMAGING BY LIQUID IMMERSION WITH TILT AND/OR ROTATION

#86 | 2026-07-09
US20260198248A1
Electricity

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#87 | 2026-07-09
US20260196451A1
Electricity

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM

#88 | 2026-07-02
US20260190951A1
Electricity

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM

#89 | 2026-07-02
US20260190918A1
Electricity

GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS

#90 | 2026-07-02
US20260190917A1
Electricity

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING APPARATUS

#91 | 2026-07-02
US20260190888A1
Electricity

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

#92 | 2026-06-25
US20260179882A1
Electricity

PROCESSING APPARATUS AND PROCESSING METHOD

#93 | 2026-06-25
US20260179878A1
Electricity

PULSE GENERATION CIRCUIT, SUBSTRATE PROCESSING APPARATUS, AND ENERGY REGENERATION METHOD

#94 | 2026-06-25
US20260179215A1
Physics

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#95 | 2026-06-18
US20260173803A1
Electricity

TRANSFER METHOD AND TRANSFER APPARATUS FOR SUBSTRATE PROCESSING SYSTEM

#96 | 2026-06-18
US20260173486A1
Electricity

SELECTIVE CHEMICAL ATOMIC LAYER ETCHING FOR METAL CONTAINING COMPOUNDS

#97 | 2026-06-18
US20260171374A1
Electricity

PLASMA PROCESSING APPARATUS AND ELECTROSTATIC CHUCK

#98 | 2026-06-18
US20260171370A1
Electricity

SUBSTRATE PROCESSING DEVICE

#99 | 2026-06-18
US20260171361A1
Electricity

ETCHING APPARATUS AND ETCHING METHOD

#100 | 2026-06-18
US20260169388A1
Physics

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Also check out Tokyo Electron Limited's (Tokyo, Japan) applicant profile with 6,812 patent applications submitted.

AssigneeID:

511 ⎘