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Inventor profile of:

Ashwin M. Purohit

City:

Gloucester, Massachusetts

Country:

United States

Published Applications:

Last publication date:

2015-01-01

Top Assignees for applications by Ashwin M. Purohit

The entities that hold a legal rights for patent applications filed by inventor Purohit Ashwin M.:

Axcelis Technologies Inc. 13 Beverly, MA United States
Axcelis Technology, Inc. 1 Beverly, MA United States

Recent patent applications by Purohit Ashwin M.

Ashwin M. Purohit from Gloucester, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2015-01-01

US20150002983A1

Electricity

Multi-resistivity Johnsen-Rahbek electrostatic clamp

#2 | 2011-12-08

US20110299218A1

Electricity

Heated annulus chuck

#3 | 2011-12-08

US20110299217A1

Electricity

Heated electrostatic chuck including mechanical clamp capability at high temperature

#4 | 2011-12-01

US20110292562A1

Electricity

Matched coefficient of thermal expansion for an electrostatic chuck

#5 | 2010-07-29

US20100187447A1

Electricity

Non-condensing thermos chuck

#6 | 2010-07-08

US20100171044A1

Electricity

Vapor compression refrigeration chuck for ion implanters

#7 | 2010-06-10

US20100142114A1

Electricity

Electrostatic chuck with compliant coat

#8 | 2010-06-10

US20100142113A1

Electricity

De-clamping wafers from an electrostatic chuck

#9 | 2010-05-06

US20100110604A1

Electricity

Electrostatic chuck ground punch

#10 | 2010-05-06

US20100110603A1

Electricity

Wafer grounding method for electrostatic clamps

#11 | 2008-08-14

US20080192405A1

Electricity

Variable frequency electrostatic clamping

#12 | 2008-06-19

US20080144251A1

Electricity

Annulus clamping and backside gas cooled electrostatic chuck

#13 | 2008-06-10

US11703427

Offset phase operation on a multiphase AC electrostatic clamp

#14 | 2008-05-01

US20080100983A1

Electricity

Sliding wafer release gripper/wafer peeling gripper

InventorID:

1021007 ⎘