Eindhoven
Netherlands
38
2019-06-13
The entities that hold a legal rights for patent applications filed by inventor BECKERS Marcel:
Marcel BECKERS from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus and device manufacturing method
#2 | 2018-10-11LITHOGRAPHIC APPARATUS, DRYING DEVICE, METROLOGY APPARATUS AND DEVICE MANUFACTURING METHOD
#3 | 2018-03-22Lithographic apparatus and device manufacturing method
#4 | 2017-10-05Lithographic apparatus and device manufacturing method
#5 | 2017-07-06Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
#6 | 2017-02-09Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid
#7 | 2017-01-26Lithographic apparatus
#8 | 2016-12-22Lithographic apparatus and device manufacturing method
#9 | 2016-02-25Lithographic apparatus and device manufacturing method
#10 | 2015-10-29Lithographic apparatus and device manufacturing method
#11 | 2015-08-20Lithographic apparatus
#12 | 2015-01-15Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
#13 | 2012-11-01Lithographic apparatus and device manufacturing method
#14 | 2012-01-12Lithographic apparatus and device manufacturing method
#15 | 2012-01-12Lithographic apparatus and device manufacturing method
#16 | 2011-11-10Lithographic apparatus and device manufacturing method
#17 | 2010-12-23Lithographic apparatus
#18 | 2010-12-23Lithographic apparatus and device manufacturing method
#19 | 2010-02-25Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
#20 | 2009-12-24Lithographic apparatus and method
#21 | 2009-10-22Lithographic apparatus
#22 | 2009-06-18Lithographic apparatus and device manufacturing method
#23 | 2009-04-23Lithographic apparatus and device manufacturing method
#24 | 2009-04-02Methods relating to immersion lithography and an immersion lithographic apparatus
#25 | 2009-03-05Lithographic apparatus and device manufacturing method
#26 | 2008-11-06Lithographic apparatus and device manufacturing method
#27 | 2008-09-04Lithographic apparatus and device manufacturing method
#28 | 2007-10-18Lithographic apparatus and device manufacturing method
#29 | 2007-06-21Lithographic apparatus and method for manufacturing a device
#30 | 2007-05-17Lithographic apparatus
#31 | 2007-04-12Lithographic apparatus and device manufacturing method
#32 | 2006-10-19Lithographic apparatus and device manufacturing method
#33 | 2006-10-05Lithographic apparatus and device manufacturing method
#34 | 2006-04-27Lithographic apparatus
#35 | 2006-03-30Lithographic apparatus and device manufacturing method
#36 | 2005-12-29Lithographic apparatus and device manufacturing method
#37 | 2005-12-01Lithographic apparatus having a gas flushing device
#38 | 2005-11-17Lithographic apparatus and device manufacturing method
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