Eindhoven
Netherlands
3
2015-02-26
The entities that hold a legal rights for patent applications filed by inventor Willems Paul:
Paul Willems from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Fluid handling structure, a lithographic apparatus and a device manufacturing method
#2 | 2012-05-17Fluid handling structure, a lithographic apparatus and a device manufacturing method
#3 | 2012-03-22FLUID HANDLING STRUCTURE, MODULE FOR AN IMMERSION LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
1077694 ⎘