Inventor profile of:

Daniel Gene Smith

City:

Tucson, Arizona

Country:

United States

Published Applications:

54

Last publication date:

2025-10-30

Top Assignees for applications by Daniel Gene Smith

The entities that hold a legal rights for patent applications filed by inventor Smith Daniel Gene:

Recent patent applications by Smith Daniel Gene

Daniel Gene Smith from Tucson, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2025-10-30
US20250334792A1
Physics

OPTICAL WEDGE IN FMCW LIDAR OPTICS SYSTEM

#2 | 2025-04-24
US20250130037A1
Physics

METROLOGY FOR ADDITIVE MANUFACTURING

#3 | 2024-11-07
US20240367257A1
Performing operations; transporting

METHODS FOR LARGE-SCALE OPTICAL MANUFACTURING

#4 | 2024-10-01
US16989157
Physics

Spatially filtered talbot interferometer for wafer distortion measurement

#5 | 2023-09-21
US20230296368A1
Physics

COMPACT SHEAROGRAPHY SYSTEM WITH ADJUSTABLE SHEAR DISTANCE

#6 | 2023-01-19
US20230015748A1
Physics

OPTICAL DELAY SYSTEM

#7 | 2022-09-15
US20220293390A1
Electricity

E-BEAM POSITION TRACKER

#8 | 2022-09-15
US20220288855A1
Performing operations; transporting

ADDITIVE MANUFACTURING SYSTEM WITH LOCALIZED CONTROLLED ENVIRONMENT

#9 | 2022-08-11
US20220252392A1
Physics

Metrology for additive manufacturing

#10 | 2022-03-17
US20220082697A1
Physics

LASER RADAR

#11 | 2021-01-28
US20210025697A1
Physics

Optical assembly, method for producing data in the same, and method for manufacturing structure

#12 | 2020-07-23
US20200232786A1
Physics

Measurement of a change in a geometrical characteristic and/or position of a workpiece

#13 | 2020-04-16
US20200117099A1
Physics

Optical objective for operation in EUV spectral region

#14 | 2020-03-05
US20200073251A1
Physics

Illumination system with curved 1d-patterned mask for use in EUV-exposure tool

#15 | 2020-02-20
US20200057373A1
Physics

Illumination system with flat 1D-patterned mask for use in EUV-exposure tool

#16 | 2019-08-01
US20190235393A1
Physics

Extreme ultraviolet lithography system that utilizes pattern stitching

#17 | 2019-04-11
US20190107388A1
Physics

Autofocus system and method

#18 | 2018-08-16
US20180231899A1
Physics

Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror

#19 | 2018-08-02
US20180217510A1
Physics

High-resolution position encoder with image sensor and encoded target pattern

#20 | 2018-02-08
US20180038682A1
Physics

Compensation for Goos-Hanchen error in autofocus systems

#21 | 2018-02-01
US20180031368A1
Physics

AUTOFOCUS SYSTEM AND METHOD

#22 | 2018-02-01
US20180031367A1
Physics

Optical assembly, method for producing data in the same, and method for manufacturing structure

#23 | 2017-11-23
US20170336720A1
Physics

Extreme ultraviolet lithography system that utilizes pattern stitching

#24 | 2017-11-23
US20170336716A1
Physics

EUV lithography system for dense line patterning

#25 | 2017-11-23
US20170336715A1
Physics

Euv lithography system for dense line patterning

#26 | 2017-11-16
US20170328538A1
Mechanical engineering

Illumination device for optimizing polarization in an illumination pupil

#27 | 2016-08-25
US20160246063A1
Physics

High order focus in laser radar tooling ball measurements

#28 | 2016-07-21
US20160209496A1
Physics

Eighth wave corner cube retarder for laser radar

#29 | 2016-01-28
US20160025480A1
Physics

INTERFEROMETRIC LEVEL SENSOR

#30 | 2015-04-30
US20150116729A1
Physics

Autofocus system and method

#31 | 2015-03-12
US20150070670A1
Physics

Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror

#32 | 2014-12-25
US20140374579A1
Physics

Two-dimensional encoder system and method

#33 | 2014-11-20
US20140340691A1
Physics

ENHANCEMENTS TO INTEGRATED OPTICAL ASSEMBLY

#34 | 2014-10-02
US20140293278A1
Physics

Compensation for Goos-Hanchen error in autofocus systems

#35 | 2014-08-21
US20140233011A1
Physics

System and method for compensating instability in an autofocus system

#36 | 2014-07-31
US20140211186A1
Physics

Fast illumination simulator based on a calibrated flexible point-spread function

#37 | 2013-08-15
US20130208104A1
Physics

Custom color or polarization sensitive CCD for separating multiple signals in autofocus projection system

#38 | 2013-06-13
US20130148359A1
Mechanical engineering

Illumination device for optimizing polarization in an illumination pupil

#39 | 2013-04-25
US20130099957A1
Physics

Optical assembly for laser radar

#40 | 2013-02-28
US20130048842A1
Physics

Measurement system and method utilizing high contrast encoder head for measuring relative movement between objects

#41 | 2012-11-01
US20120274913A1
Physics

ENHANCED CONTRAST PIN MIRROR FOR LITHOGRAPHY TOOLS

#42 | 2012-09-20
US20120236397A1
Physics

Two Mirror Optical System

#43 | 2012-09-06
US20120224172A1
Physics

Optical components for use in measuring projection lens distortion or focus of an optical imaging system that images a substrate

#44 | 2012-08-23
US20120212722A1
Physics

Fast Illumination Simulator Based on a Calibrated Flexible Point Spread Function

#45 | 2012-07-26
US20120188557A1
Physics

Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure

#46 | 2012-06-07
US20120140353A1
Physics

Compound parabolic collectors for projection lens metrology

#47 | 2012-02-09
US20120032067A1
Physics

Two dimensional encoder system and method

#48 | 2012-01-12
US20120008150A1
Physics

Autofocus system and method

#49 | 2011-12-08
US20110299092A1
Physics

Imaging optical system for producing control information regarding lateral movement of an image plane or an object plane

#50 | 2011-03-24
US20110071784A1
Physics

Goos-Hanchen compensation in autofocus systems

#51 | 2010-09-30
US20100245829A1
Physics

System and method for compensating instability in an autofocus system

#52 | 2010-09-30
US20100245797A1
Physics

Substrate Handling Structure

#53 | 2010-03-04
US20100053588A1
Physics

Substrate Stage movement patterns for high throughput While Imaging a Reticle to a pair of Imaging Locations

#54 | 2009-05-28
US20090135437A1
Physics

Autofocus system with error compensation

InventorID:

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