Japan
72
2023-03-16
72
2025-05-20
These are the the leading inventors for applications assigned to Nikon Corporation:
Nikon Corporation based in , JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Analyzer system for aligning and focusing an energy beam in a three-dimensional printer
#2 | 2022-09-29 ✅ Patent 11,921,025 granted on 2024-03-05Fluid monitoring system
#3 | 2020-07-23 ✅ Patent 11,982,521 granted on 2024-05-14Measurement of a change in a geometrical characteristic and/or position of a workpiece
#4 | 2019-08-01 ✅ Patent 10,747,117 granted on 2020-08-18Extreme ultraviolet lithography system that utilizes pattern stitching
#5 | 2019-07-11 ✅ Patent 10,712,671 granted on 2020-07-14Dense line extreme ultraviolet lithography system with distortion matching
#6 | 2018-09-27 ✅ Patent 10,527,956 granted on 2020-01-07Temperature controlled heat transfer frame for pellicle
#7 | 2018-06-28 ✅ Patent 10,290,083 granted on 2019-05-14Multiple phase method for image deconvolution
#8 | 2018-06-28 ✅ Patent 10,578,977 granted on 2020-03-03On-board supply system for a stage assembly
#9 | 2018-04-19 ✅ Patent 10,254,654 granted on 2019-04-09Microelectromechanical mirror assembly
#10 | 2018-03-15 ✅ Patent 10,394,138 granted on 2019-08-27System and method for control of a workpiece and a chuck
#11 | 2017-12-21 ✅ Patent 10,339,643 granted on 2019-07-02Algorithm and device for image processing
#12 | 2017-11-23 ✅ Patent 10,295,911 granted on 2019-05-21Extreme ultraviolet lithography system that utilizes pattern stitching
#13 | 2017-05-25 ✅ Patent 10,840,103 granted on 2020-11-17Forced grid method for correcting mask patterns for a pattern transfer apparatus
#14 | 2017-03-16 ✅ Patent 10,812,695 granted on 2020-10-20Three-dimensional positioning system using surface pattern recognition and interpolation
#15 | 2017-02-16 ✅ Patent 10,389,922 granted on 2019-08-20Multi-wavelength detector
#16 | 2016-10-13 ✅ Patent 9,904,178 granted on 2018-02-27On-board supply system for a stage assembly
#17 | 2016-06-16 ✅ Patent 9,928,579 granted on 2018-03-27Multiple phase method for image deconvolution
#18 | 2016-03-17 ✅ Patent 10,165,263 granted on 2018-12-25Point spread function estimation of optics blur
#19 | 2016-02-18 ✅ Patent 9,779,491 granted on 2017-10-03Algorithm and device for image processing
#20 | 2016-01-14 ✅ Patent 10,289,007 granted on 2019-05-14Lithography tool having a reticle stage capable of dynamic reticle bending to compensate for distortion
#21 | 2015-11-26 ✅ Patent 10,261,419 granted on 2019-04-16Magnet array for moving magnet planar motor
#22 | 2015-10-22 ✅ Patent 9,726,987 granted on 2017-08-08Positioning system using surface pattern recognition and interpolation
#23 | 2015-10-15 ✅ Patent 9,530,079 granted on 2016-12-27Point spread function classification using structural properties
#24 | 2015-09-10 ✅ Patent 9,589,328 granted on 2017-03-07Globally dominant point spread function estimation
#25 | 2015-05-28 ✅ Patent 9,778,579 granted on 2017-10-03System and method for controlling a temperature of a reaction assembly
#26 | 2015-05-07 ✅ Patent 10,121,760 granted on 2018-11-06Wafer bonding system and method
#27 | 2015-05-07 ✅ Patent 9,947,637 granted on 2018-04-17System and method for clamping wafers together in alignment using pressure
#28 | 2015-04-30 ✅ Patent 9,639,003 granted on 2017-05-02Programmable imaging assembly for manufacturing biotest post arrays
#29 | 2015-04-30 ✅ Patent 10,259,104 granted on 2019-04-16Precision clamp
#30 | 2015-02-26 ✅ Patent 9,874,817 granted on 2018-01-23Microelectromechanical mirror assembly
#31 | 2014-12-04 ✅ Patent 9,262,815 granted on 2016-02-16Algorithm for minimizing latent sharp image cost function and point spread function cost function with a spatial mask in a regularization term
#32 | 2014-11-27 ✅ Patent 9,245,328 granted on 2016-01-26Algorithm for minimizing latent sharp image cost function and point spread function with a spatial mask in a fidelity term
#33 | 2014-07-24 ✅ Patent 9,921,495 granted on 2018-03-20Magnetic sensor calibration and servo for planar motor stage
#34 | 2014-07-03 ✅ Patent 9,534,934 granted on 2017-01-03High resolution encoder head
#35 | 2014-03-20 ✅ Patent 9,323,157 granted on 2016-04-26Mirror assembly for an exposure apparatus
#36 | 2014-03-20 ✅ Patent 9,235,882 granted on 2016-01-12Method for detecting existence of dust spots in digital images based on locally adaptive thresholding
#37 | 2014-03-20 ✅ Patent 9,338,354 granted on 2016-05-10Motion blur estimation and restoration using light trails
#38 | 2014-03-13 ✅ Patent 10,114,193 granted on 2018-10-30Fly's eye optical mirror with a plurality of optical elements rotationally aligned along two axes
#39 | 2014-02-20 ✅ Patent 9,243,896 granted on 2016-01-26Two axis encoder head assembly
#40 | 2013-08-15 ✅ Patent 9,213,227 granted on 2015-12-15Custom color or polarization sensitive CCD for separating multiple signals in autofocus projection system
#41 | 2013-07-25 ✅ Patent 9,237,261 granted on 2016-01-12Apparatus and method for improving contrast detected in a fringe projection autofocus system
#42 | 2013-07-04 ✅ Patent 9,412,039 granted on 2016-08-09Blur detection system for night scene images
#43 | 2013-04-11 ✅ Patent 9,298,077 granted on 2016-03-29Reaction assembly for a stage assembly
#44 | 2012-09-13 ✅ Patent 9,291,918 granted on 2016-03-22Light source assembly that generates heterodyne output beams
#45 | 2012-06-07 ✅ Patent 8,820,948 granted on 2014-09-02Compound parabolic collectors for projection lens metrology
#46 | 2012-05-10 ✅ Patent 9,465,305 granted on 2016-10-11Method for determining a commutation offset and for determining a compensation map for a stage
#47 | 2012-03-29 ✅ Patent 8,910,093 granted on 2014-12-09Fast photoresist model
#48 | 2012-02-09 ✅ Patent 8,829,420 granted on 2014-09-09Two dimensional encoder system and method
#49 | 2010-04-22 ✅ Patent 9,304,385 granted on 2016-04-05Exposure method and device manufacturing method including selective deformation of a mask
#50 | 2009-01-29 ✅ Patent 7,804,583 granted on 2010-09-28EUV reticle handling system and method
#51 | 2008-03-20 ✅ Patent 7,741,616 granted on 2010-06-22EUV light source, EUV exposure equipment, and semiconductor device manufacturing method
#52 | 2007-09-13 ✅ Patent 7,745,079 granted on 2010-06-29Apparatus for and method of thermophoretic protection of an object in a high-vacuum environment
#53 | 2007-04-12 ✅ Patent 7,612,892 granted on 2009-11-03Imaging optical system configured with through the lens optics for producing control information
#54 | 2006-11-16 ✅ Patent 7,169,016 granted on 2007-01-30Chemical mechanical polishing end point detection apparatus and method
#55 | 2006-10-26 ✅ Patent 7,366,642 granted on 2008-04-29Minimum force output control method for counter-mass with cable
#56 | 2006-06-13 ✅ Patent 7,061,577 granted on 2006-06-13Image adjustor including damping assembly
#57 | 2006-06-01 ✅ Patent 7,119,877 granted on 2006-10-10Exposure apparatus including a non-contact utilities transfer assembly
#58 | 2006-05-04 ✅ Patent 7,368,838 granted on 2008-05-06High efficiency voice coil motor
#59 | 2006-03-09 ✅ Patent 7,375,800 granted on 2008-05-20Non-contact pneumatic transfer for stages with small motion
#60 | 2006-02-16 ✅ Patent 7,333,179 granted on 2008-02-19Moving mechanism with high bandwidth response and low force transmissibility
#61 | 2005-10-11 ✅ Patent 6,953,109 granted on 2005-10-11Vibration isolator with low lateral stiffness
#62 | 2005-09-20 ✅ Patent 6,947,862 granted on 2005-09-20Method for simulating slurry flow for a grooved polishing pad
#63 | 2005-08-11 ✅ Patent 7,034,474 granted on 2006-04-25Auto-calibration of attraction-only type actuator commutations
#64 | 2005-08-09 ✅ Patent 6,927,838 granted on 2005-08-09Multiple stage, stage assembly having independent stage bases
#65 | 2005-08-04 ✅ Patent 7,288,859 granted on 2007-10-30Wafer stage operable in a vacuum environment
#66 | 2005-08-04 ✅ Patent 6,979,920 granted on 2005-12-27Circulation housing for a mover
#67 | 2005-05-03 ✅ Patent 6,888,620 granted on 2005-05-03System and method for holding a device with minimal deformation
#68 | 2005-04-19 ✅ Patent 6,882,126 granted on 2005-04-19Holder mover for a stage assembly
#69 | 2005-03-08 ✅ Patent 6,864,601 granted on 2005-03-08Electric motors with reduced stray magnetic fields
#70 | 2005-02-15 ✅ Patent 6,855,032 granted on 2005-02-15Fine force control of actuators for chemical mechanical polishing apparatuses
#71 | 2005-01-25 ✅ Patent 6,847,431 granted on 2005-01-25Method and device for controlling fluid flow in an optical assembly
#72 | 2005-01-20 ✅ Patent 6,956,308 granted on 2005-10-18Dual flow circulation system for a mover
361437 ⎘