Austin, Texas
United States
22
2021-05-20
The entities that hold a legal rights for patent applications filed by inventor Pergande Paul E.:
Paul E. Pergande from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Modular LED heater
#2 | 2020-12-10Contactless workpiece temperature sensor
#3 | 2020-11-26Single Layer PCB Circuit Layout For Uniform Radial LED Array
#4 | 2020-09-03Buffer chamber wafer heating mechanism and supporting robots
#5 | 2020-01-23Silicon carbide substrate heating
#6 | 2020-01-23Anti-reflective coating for transparent end effectors
#7 | 2019-10-10System and apparatus for process chamber window cooling
#8 | 2019-08-22Batch heating and cooling chamber or loadlock
#9 | 2019-01-17Buffer chamber wafer heating mechanism and supporting robots
#10 | 2017-12-14System and method to monitor semiconductor workpiece temperature using thermal imaging
#11 | 2017-06-22Self-damping end effector
#12 | 2017-06-08PLANAR END EFFECTOR AND METHOD OF MAKING A PLANAR END EFFECTOR
#13 | 2016-12-29Electrostatic chuck with LED heating
#14 | 2016-10-20Buffer chamber wafer heating mechanism and supporting robot
#15 | 2016-07-28Batch LED heating and cooling chamber or loadlock
#16 | 2016-01-07Composite end effector and method of making a composite end effector
#17 | 2015-10-15PLANAR END EFFECTOR AND METHOD OF MAKING A PLANAR END EFFECTOR
#18 | 2015-10-01End effector pads
#19 | 2015-03-05HIGH TEMPERATURE PLATEN POWER CONTACT
#20 | 2014-09-18COMPOSITE END EFFECTORS
#21 | 2014-09-18Wafer handling apparatus
#22 | 2014-09-18Wafer handling apparatus
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