Miyagi
Japan
5
2017-11-09
The entities that hold a legal rights for patent applications filed by inventor SUZUKI Eiji:
Eiji SUZUKI from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for etching silicon layer and plasma processing apparatus
#2 | 2015-06-11Method for etching silicon layer and plasma processing apparatus
#3 | 2015-05-21Multilayer film etching method and plasma processing apparatus
#4 | 2015-03-05Method of selectively removing a region formed of silicon oxide and plasma processing apparatus
#5 | 2014-11-13Plasma etching method
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