San Jose, California
United States
21
2024-09-26
The entities that hold a legal rights for patent applications filed by inventor MAROHL DAN A.:
DAN A. MAROHL from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
#2 | 2021-02-25Consolidated filter arrangement for devices in an RF environment
#3 | 2020-05-14Tunable temperature controlled substrate support assembly
#4 | 2020-02-13Substrate carrier using a proportional thermal fluid delivery system
#5 | 2018-06-07Consolidated filter arrangement for devices in an RF environment
#6 | 2018-06-07Consolidated filter arrangement for devices in an RF environment
#7 | 2016-11-10Tunable temperature controlled substrate support assembly
#8 | 2016-05-26CONTROL ARCHITECTURE FOR DEVICES IN AN RF ENVIRONMENT
#9 | 2016-05-26Consolidated filter arrangement for devices in an RF environment
#10 | 2016-05-26Substrate carrier using a proportional thermal fluid delivery system
#11 | 2016-01-28Tunable temperature controlled substrate support assembly
#12 | 2015-03-12Power deposition control in inductively coupled plasma (ICP) reactors
#13 | 2010-05-06Retaining ring with tapered inner surface
#14 | 2009-03-26SINGLE WAFER METHOD AND APPARATUS FOR DRYING SEMICONDUCTOR SUBSTRATES USING AN INERT GAS AIR-KNIFE
#15 | 2009-02-19Single wafer apparatus for drying semiconductor substrates using an inert gas air-knife
#16 | 2009-02-05SINGLE WAFER METHOD AND APPARATUS FOR DRYING SEMICONDUCTOR SUBSTRATES USING AN INERT GAS AIR-KNIFE
#17 | 2008-09-04Scrubber box and methods for using the same
#18 | 2006-12-14Retaining ring with flange for chemical mechanical polishing
#19 | 2006-08-22Retaining ring with flange for chemical mechanical polishing
#20 | 2005-04-28Scrubber box
#21 | 2005-01-04Integrated platen assembly for a chemical mechanical planarization system
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