Dusseldorf
Germany
11
2016-02-04
The entities that hold a legal rights for patent applications filed by inventor Kubis Michael:
Michael Kubis from Dusseldorf, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Metrology method and inspection apparatus, lithographic system and device manufacturing method
#2 | 2015-06-04Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods
#3 | 2015-05-28Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement system
#4 | 2014-08-21Substrate and patterning device for use in metrology, metrology method and device manufacturing method
#5 | 2014-03-27Inspection method and apparatus and lithographic processing cell
#6 | 2013-09-05Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods
#7 | 2013-06-13Device manufacturing method and associated lithographic apparatus, inspection apparatus, and lithographic processing cell
#8 | 2013-04-25Metrology method and apparatus, and device manufacturing method
#9 | 2013-03-07Substrate and patterning device for use in metrology, metrology method and device manufacturing method
#10 | 2013-02-28Metrology method and apparatus, and device manufacturing method
#11 | 2012-05-17Metrology method and inspection apparatus, lithographic system and device manufacturing method
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