Jena
Germany
11
2024-10-24
The entities that hold a legal rights for patent applications filed by inventor Birkner Andreas:
Andreas Birkner from Jena, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD FOR PROCESSING SUBSTRATES, IN PARTICULAR WAFERS, MASKS OR FLAT PANEL DISPLAYS, WITH A SEMI-CONDUCTOR INDUSTRY MACHINE
#2 | 2023-12-07DEVICE AND METHOD FOR IMAGING AN OBJECT IN AT LEAST TWO VIEWS
#3 | 2021-11-11Method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machine
#4 | 2018-06-07SERVICE CART
#5 | 2017-09-21Maintenance apparatus
#6 | 2013-08-15SYSTEM AND METHOD FOR COOLING A COMPUTER SYSTEM
#7 | 2013-02-28SYSTEM AND METHOD FOR COOLING A PROCESSING SYSTEM
#8 | 2008-09-25Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers
#9 | 2006-04-18Method and arrangement for transporting and inspecting semiconductor substrates
#10 | 2005-11-08Substrate conveying module and system made up of substrate conveying module and workstation
#11 | 2005-01-18Arrangement and method for the identification of substrates
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