Weilburg
Germany
83
2012-12-20
63
2013-11-12
These are the the leading inventors for applications assigned to VISTEC SEMICONDUCTOR SYSTEMS GMBH:
VISTEC SEMICONDUCTOR SYSTEMS GMBH based in Weilburg, DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
#2 | 2012-02-09Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device
#3 | 2012-02-09Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device
#4 | 2010-09-02 ✅ Patent 8,248,618 granted on 2012-08-21Method for determining positions of structures on a mask
#5 | 2010-08-19 ✅ Patent 7,823,295 granted on 2010-11-02Method for calibration of a measuring table of a coordinate measuring machine
#6 | 2010-05-06 ✅ Patent 7,903,259 granted on 2011-03-08Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
#7 | 2010-03-11Apparatus and method for determining the focus position
#8 | 2010-01-28 ✅ Patent 8,351,049 granted on 2013-01-08Interferometric device for position measurement and coordinate measuring machine
#9 | 2009-12-24Method and device for inspecting a disk-shaped object
#10 | 2009-11-12DEVICE AND METHOD FOR THE INSPECTION OF DEFECTS ON THE EDGE REGION OF A WAFER
#11 | 2009-07-30 ✅ Patent 7,906,978 granted on 2011-03-15Device for measuring or inspecting substrates of the semiconductor industry
#12 | 2009-06-25 ✅ Patent 8,200,004 granted on 2012-06-12Method for inspecting a surface of a wafer with regions of different detection sensitivity
#13 | 2009-06-25 ✅ Patent 8,090,185 granted on 2012-01-03Method for optical inspection, detection and visualization of defects on disk-shaped objects
#14 | 2009-06-18COORDINATE MEASURING MACHINE WITH TEMPERATURE ADAPTING STATION
#15 | 2009-06-18 ✅ Patent 8,264,534 granted on 2012-09-11Method and apparatus for processing the image data of the surface of a wafer recorded by at least one camera
#16 | 2009-05-21 ✅ Patent 7,973,931 granted on 2011-07-05Method for determining the position of the edge bead removal line of a disk-like object
#17 | 2009-05-21 ✅ Patent 7,872,763 granted on 2011-01-18Device for measuring the position of at least one structure on a substrate
#18 | 2009-05-21Apparatus and method for supporting a substrate at a position with high precision
#19 | 2009-04-30 ✅ Patent 7,948,635 granted on 2011-05-24Method for determining positions of structures on a substrate
#20 | 2009-04-16 ✅ Patent 7,986,409 granted on 2011-07-26Method for determining the centrality of masks
#21 | 2009-04-02 ✅ Patent 8,087,799 granted on 2012-01-03Illumination means and inspection means having an illumination means
#22 | 2009-03-19MEANS AND METHOD FOR DETERMINING THE SPATIAL POSITION OF MOVING ELEMENTS OF A COORDINATE MEASURING MACHINE
#23 | 2009-03-12 ✅ Patent 7,769,556 granted on 2010-08-03Method for correcting measuring errors caused by the lens distortion of an objective
#24 | 2009-03-12Arrangement and method for improving the measurement accuracy in the nm range for optical systems
#25 | 2009-03-12 ✅ Patent 7,864,319 granted on 2011-01-04Device and method for determining an optical property of a mask
#26 | 2009-02-26 ✅ Patent 8,200,003 granted on 2012-06-12Method for the optical inspection and visualization of optical measuring values obtained from disk-like objects
#27 | 2009-02-26 ✅ Patent 7,675,633 granted on 2010-03-09Method for measuring positions of structures on a substrate with a coordinate measuring machine
#28 | 2009-02-26METHOD FOR DETERMINING THE POSITION OF A MEASUREMENT OBJECTIVE IN THE Z-COORDINATE DIRECTION OF AN OPTICAL MEASURING MACHINE HAVING MAXIMUM REPRODUCIBILITY OF MEASURED STRUCTURE WIDTHS
#29 | 2009-02-19 ✅ Patent 7,939,789 granted on 2011-05-10Method for reproducibly determining geometrical and/or optical object characteristics
#30 | 2009-02-12 ✅ Patent 7,929,149 granted on 2011-04-19Coordinate measuring machine and a method for correcting non-linearities of the interferometers of a coordinate measuring machine
#31 | 2009-02-05Device and method for scanning the whole surface of a wafer
#32 | 2009-02-05 ✅ Patent 8,149,383 granted on 2012-04-03Method for determining the systematic error in the measurement of positions of edges of structures on a substrate resulting from the substrate topology
#33 | 2009-02-05 ✅ Patent 7,978,340 granted on 2011-07-12System and method for determining positions of structures on a substrate
#34 | 2009-02-05 ✅ Patent 7,961,334 granted on 2011-06-14Coordinate measuring machine for measuring structures on a substrate
#35 | 2009-01-29 ✅ Patent 7,826,068 granted on 2010-11-02Method for correcting measured values resulting from the bending of a substrate
#36 | 2009-01-22 ✅ Patent 7,584,072 granted on 2009-09-01Method for determining correction values for the measured values of positions of structures on a substrate
#37 | 2009-01-22 ✅ Patent 7,680,616 granted on 2010-03-16Method for correcting an error of the imaging system of a coordinate measuring machine
#38 | 2009-01-15DEVICE AND METHOD FOR IMPROVING THE MEASUREMENT ACCURACY IN AN OPTICAL CD MEASUREMENT SYSTEM
#39 | 2009-01-15 ✅ Patent 8,056,434 granted on 2011-11-15Advancing means for a multi-coordinate measurement table of a coordinate measuring device and method for controlling such an advancing means
#40 | 2009-01-01 ✅ Patent 7,817,262 granted on 2010-10-19Device for measuring positions of structures on a substrate
#41 | 2009-01-01Coordinate measuring machine with vibration decoupling and method for vibration decoupling of a coordinate measuring machine
#42 | 2009-01-01 ✅ Patent 8,115,808 granted on 2012-02-14Coordinate measuring machine and method for calibrating the coordinate measuring machine
#43 | 2008-12-11 ✅ Patent 8,390,927 granted on 2013-03-05Element for homogenizing the illumination with simultaneous setting of the polarization degree
#44 | 2008-12-11 ✅ Patent 7,889,338 granted on 2011-02-15Coordinate measuring machine and method for structured illumination of substrates
#45 | 2008-12-04 ✅ Patent 7,654,007 granted on 2010-02-02Method for improving the reproducibility of a coordinate measuring apparatus and its accuracy
#46 | 2008-11-13 ✅ Patent 7,982,950 granted on 2011-07-19Measuring system for structures on a substrate for semiconductor manufacture
#47 | 2008-10-16 ✅ Patent 7,551,296 granted on 2009-06-23Method for determining the focal position of at least two edges of structures on a substrate
#48 | 2008-10-09METHOD FOR DETECTING DEFECTS ON THE BACK SIDE OF A SEMICONDUCTOR WAFER
#49 | 2008-09-25 ✅ Patent 8,089,622 granted on 2012-01-03Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers
#50 | 2008-08-28Method of determining geometric parameters of a wafer
#51 | 2008-08-28 ✅ Patent 7,768,637 granted on 2010-08-03Method for acquiring high-resolution images of defects on the upper surface of the wafer edge
#52 | 2008-08-28 ✅ Patent 8,102,541 granted on 2012-01-24Apparatus and method for measuring structures on a mask and or for calculating structures in a photoresist resulting from the structures
#53 | 2008-08-28 ✅ Patent 7,694,426 granted on 2010-04-13Method for eliminating sources of error in the system correction of a coordinate measuring machine
#54 | 2008-08-14 ✅ Patent 7,903,259 granted on 2011-03-08Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
#55 | 2008-07-24 ✅ Patent 7,602,481 granted on 2009-10-13Method and apparatus for inspecting a surface
#56 | 2008-06-19Apparatus for wafer inspection
#57 | 2008-06-19Apparatus for wafer inspection
#58 | 2008-03-13Method for Selecting a Wavelength, and a Microscope
#59 | 2008-02-07Apparatus and method for measuring the height profile of a structured substrate
#60 | 2007-12-27Wafer handling device
#61 | 2007-11-22 ✅ Patent 7,528,960 granted on 2009-05-05Method for enhancing the measuring accuracy when determining the coordinates of structures on a substrate
#62 | 2007-11-22 ✅ Patent 7,548,321 granted on 2009-06-16Method for enhancing the measuring accuracy when determining the coordinates of structures on a substrate
#63 | 2007-09-11 ✅ Patent 7,268,940 granted on 2007-09-11Illuminating device
#64 | 2007-09-04 ✅ Patent 7,265,343 granted on 2007-09-04Apparatus and method for calibration of an optoelectronic sensor and for mensuration of features on a substrate
#65 | 2007-07-12 ✅ Patent 7,561,263 granted on 2009-07-14Apparatus for illuminating and inspecting a surface
#66 | 2007-04-05 ✅ Patent 7,477,370 granted on 2009-01-13Method of detecting incomplete edge bead removal from a disk-like object
#67 | 2007-03-08 ✅ Patent 7,545,489 granted on 2009-06-09Apparatus and method of inspecting the surface of a wafer
#68 | 2007-02-08 ✅ Patent 7,416,819 granted on 2008-08-26Test mask for optical and electron optical systems
#69 | 2006-12-14 ✅ Patent 7,450,246 granted on 2008-11-11Measuring device and method for determining relative positions of a positioning stage configured to be moveable in at least one direction
#70 | 2006-11-02 ✅ Patent 7,489,394 granted on 2009-02-10Apparatus for inspecting a disk-like object
#71 | 2006-10-26 ✅ Patent 7,382,450 granted on 2008-06-03Method of detecting an edge bead removal line on a wafer
#72 | 2006-09-14 ✅ Patent 7,657,077 granted on 2010-02-02Detecting defects by three-way die-to-die comparison with false majority determination
#73 | 2006-08-17 ✅ Patent 7,277,160 granted on 2007-10-02Method for automatically providing data for the focus monitoring of a lithographic process
#74 | 2005-11-17 ✅ Patent 7,420,670 granted on 2008-09-02Measuring instrument and method for operating a measuring instrument for optical inspection of an object
#75 | 2005-10-06 ✅ Patent 7,268,867 granted on 2007-09-11Apparatus and method for inspecting a semiconductor component
#76 | 2005-08-04 ✅ Patent 7,460,219 granted on 2008-12-02Method for optically inspecting a wafer by sequentially illuminating with bright and dark field light beams wherein the images from the bright and dark field illuminated regions are spatially offset
#77 | 2005-06-23 ✅ Patent 7,307,713 granted on 2007-12-11Apparatus and method for inspection of a wafer
#78 | 2005-06-23 ✅ Patent 7,292,328 granted on 2007-11-06Method for inspection of a wafer
#79 | 2005-05-12 ✅ Patent 7,265,823 granted on 2007-09-04System for the detection of macrodefects
#80 | 2005-02-17 ✅ Patent 7,387,859 granted on 2008-06-17Method for measuring overlay shift
#81 | 2005-01-06 ✅ Patent 7,248,354 granted on 2007-07-24Apparatus for inspection of a wafer
#82 | 2005-01-06 ✅ Patent 7,193,699 granted on 2007-03-20Method and apparatus for scanning a semiconductor wafer
#83 | 2005-01-06 ✅ Patent 7,327,450 granted on 2008-02-05Apparatus for inspection of a wafer
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