Livermore, California
United States
6
2017-01-12
The entities that hold a legal rights for patent applications filed by inventor Deshmukh Subhash:
Subhash Deshmukh from Livermore, US has applied for patents for these inventions. The list has both pending applications and granted patents:
UV-ASSISTED REACTIVE ION ETCH FOR COPPER
#2 | 2016-11-10RESIST HARDENING AND DEVELOPMENT PROCESSES FOR SEMICONDUCTOR DEVICE MANUFACTURING
#3 | 2015-04-09Process for etching metal using a combination of plasma and solid state sources
#4 | 2015-04-09LED based optical source coupled with plasma source
#5 | 2014-09-18PULSED DC PLASMA ETCHING PROCESS AND APPARATUS
#6 | 2014-09-18Resist hardening and development processes for semiconductor device manufacturing
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