Sunnyvale, California
United States
10
2022-12-29
The entities that hold a legal rights for patent applications filed by inventor RAMALINGAM Jothilingam:
Jothilingam RAMALINGAM from Sunnyvale, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Cleaning of SIN with CCP plasma or RPS clean
#2 | 2022-12-29Cleaning of sin with CCP plasma or RPS clean
#3 | 2020-03-19Apparatus for enhancing flow uniformity in a process chamber
#4 | 2020-02-13HIGH POWER IMPULSE MAGNETRON SPUTTERING PHYSICAL VAPOR DEPOSITION OF TUNGSTEN FILMS HAVING IMPROVED BOTTOM COVERAGE
#5 | 2018-11-22Systems and methods for low resistivity physical vapor deposition of a tungsten film
#6 | 2018-04-05Methods and devices using PVD ruthenium
#7 | 2017-04-27Systems and methods for low resistivity physical vapor deposition of a tungsten film
#8 | 2016-10-04Tungsten silicide nitride films and methods of formation
#9 | 2016-06-16PARTICLE REDUCTION IN A DEPOSITION CHAMBER USING THERMAL EXPANSION COEFFICIENT COMPATIBLE COATING
#10 | 2015-04-30METHOD OF MAKING SOURCE/DRAIN CONTACTS BY SPUTTERING A DOPED TARGET
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