Yusuke Hirayama

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2013-02-28

Top Assignees for applications by Yusuke Hirayama

The entities that hold a legal rights for patent applications filed by inventor Hirayama Yusuke:

Yusuke Hirayama from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Method for manufacturing semiconductor device using anisotropic etching

Plasma processing apparatus and plasma processing method

Plasma processing method and high-rate plasma etching apparatus

Substrate processing apparatus and method, and program and storage medium

Etching method and computer-readable storage medium

InventorID:

115100 ⎘