Kaoru YAMAMOTO

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2015-12-10

Top Assignees for applications by Kaoru YAMAMOTO

The entities that hold a legal rights for patent applications filed by inventor YAMAMOTO Kaoru:

Kaoru YAMAMOTO from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Cooling processing apparatus and method for operating the same

Electrostatic attraction apparatus, electrostatic chuck and cooling treatment apparatus

Trap assembly in film forming apparatus

Deposition device

Substrate mounting mechanism, and substrate processing apparatus

Mounting table structure, film forming apparatus and raw material recovery method

Raw material recovery method and trapping mechanism for recovering raw material

Substrate supporting structure for semiconductor processing, and plasma processing device

InventorID:

1163789 ⎘