Gyeonggi-do
South Korea
6
2016-01-14
The entities that hold a legal rights for patent applications filed by inventor Chae Hee Sun:
Hee Sun Chae from Gyeonggi-do, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate Processing Device and Method of Handling Particles Thereof
#2 | 2016-01-14Apparatus For Generating Plasma Using Dual Plasma Source And Apparatus For Treating Substrate Including The Same
#3 | 2015-05-21Substrate Treating Apparatus and Method
#4 | 2007-01-11METHOD OF WAFER EDGE EXPOSURE
#5 | 2006-11-02Semiconductor process for removing defects due to edge chips of a semiconductor wafer and semiconductor device fabricated thereby
#6 | 2006-09-05Semiconductor process for removing defects due to edge chips of a semiconductor wafer and semiconductor device fabricated thereby
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