Santa Clara, California
United States
12
2021-11-18
The entities that hold a legal rights for patent applications filed by inventor BUSCHE Matthew:
Matthew BUSCHE from Santa Clara, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Thermal switch
#2 | 2021-06-22Thermal switch
#3 | 2020-12-15Thermal switch
#4 | 2020-10-22Thermal switch
#5 | 2018-12-20Edge seal configurations for a lower electrode assembly
#6 | 2017-04-27Optical fiber temperature sensors, temperature monitoring apparatus, and manufacturing methods
#7 | 2016-01-07Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers
#8 | 2016-01-07Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods
#9 | 2015-12-10Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods
#10 | 2015-07-02Edge seal for lower electrode assembly
#11 | 2015-05-21Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods
#12 | 2011-11-24Apparatus and method for temperature control of a semiconductor substrate support
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