Austin, Texas
United States
5
2019-04-04
The entities that hold a legal rights for patent applications filed by inventor Lane Barton G.:
Barton G. Lane from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Ultra-localized and plasma uniformity control in a plasma processing system
#2 | 2018-08-23Facilitation of orthotopic patterns during substrate fabrication
#3 | 2018-05-10Self-limiting cyclic etch method for carbon-based films
#4 | 2016-10-13Plasma generation and control using a DC ring
#5 | 2015-06-18System and method for controlling plasma density
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