Santa Clara, California
United States
5
2020-07-23
The entities that hold a legal rights for patent applications filed by inventor AGARWAL PULKIT:
PULKIT AGARWAL from Santa Clara, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and Apparatus for cleaning a substrate
#2 | 2017-05-25Methods for forming low-resistance contacts through integrated process flow systems
#3 | 2016-11-03Methods and Apparatus for Cleaning a Substrate
#4 | 2016-01-21Cleaning of chamber components with solid carbon dioxide particles
#5 | 2015-06-18Substrate support apparatus having reduced substrate particle generation
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