Thomas GEBELE

VACUUM PROCESSING APPARATUS, VACUUM SYSTEM, GAS PARTIAL PRESSURE CONTROL ASSEMBLY, AND METHOD OF CONTROLLING PARTIAL PRESSURE OF A GAS IN A VACUUM PROCESSING CHAMBER

Method of coating a substrate and coating apparatus for coating a substrate

EVAPORATION SOURCE FOR DEPOSITION OF EVAPORATED MATERIAL ON A SUBSTRATE, DEPOSITION APPARATUS, METHOD FOR MEASURING A VAPOR PRESSURE OF EVAPORATED MATERIAL, AND METHOD FOR DETERMINING AN EVAPORATION RATE OF AN EVAPORATED MATERIAL

Method of coating a substrate and coating apparatus for coating a substrate

APPARATUS FOR VACUUM SPUTTER DEPOSITION AND METHOD THEREFOR

MATERIAL DEPOSITION ARRANGEMENT, A VACUUM DEPOSITION SYSTEM AND METHOD FOR DEPOSITING MATERIAL

SUBSTRATE CARRIER FOR A REDUCED TRANSMISSION OF THERMAL ENERGY

LOAD LOCK CHAMBER, SUBSTRATE PROCESSING SYSTEM AND METHOD FOR VENTING

LOAD LOCK CHAMBER, SUBSTRATE PROCESSING SYSTEM AND METHOD FOR VENTING

EVAPORATOR, COATING INSTALLATION, AND METHOD FOR USE THEREOF

GAS SUPPLY SYSTEM, PUMPING SYSTEM, COATING SYSTEM, GAS SUPPLY METHOD, AND PUMPING METHOD

BACKSIDE COATING PREVENTION DEVICE, COATING CHAMBER COMPRISING A BACKSIDE COATING PREVENTION DEVICE, AND METHOD OF COATING

Flooding Chamber For Coating Installations

Substrate carrier

Lock chamber device for vacuum treatment unit and procedures for its operation

Device for coating hollow bodies, in particular plastic bottles, that has a high vaccum region and sluice

Electrode arrangement

Method and device for the determination of the gas permeability of a container