Norheim
Germany
7
2021-11-25
The entities that hold a legal rights for patent applications filed by inventor Berger Thomas:
Thomas Berger from Norheim, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
VACUUM PROCESSING SYSTEM AND METHOD OF OPERATING A VACUUM PROCESSING SYSTEM
#2 | 2015-04-02ROTATABLE SPUTTER TARGET
#3 | 2013-03-07SUBSTRATE SUPPORT, SUBSTRATE PROCESSING DEVICE AND METHOD OF PLACING A SUBSTRATE
#4 | 2011-12-08PROCESSING SYSTEM AND METHOD OF OPERATING A PROCESSING SYSTEM
#5 | 2011-05-26ANODE ROD FOR A SPUTTERING SYSTEM
#6 | 2009-12-31PROCESSING SYSTEM AND METHOD OF OPERATING A PROCESSING SYSTEM
#7 | 2008-12-04Substrate support, substrate processing device and method of placing a substrate
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