Miyagi
Japan
7
2026-04-23
The entities that hold a legal rights for patent applications filed by inventor SON Ryou:
Ryou SON from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
UPPER TOP PLATE AND SUBSTRATE PROCESSING APPARATUS
#2 | 2025-06-12METHOD FOR MANUFACTURING COMPONMENT AND COMPONENT
#3 | 2021-04-08SUBSTRATE SUPPORT PEDESTAL AND PLASMA PROCESSING APPARATUS
#4 | 2021-01-07SUBSTRATE PROCESSING APPARATUS
#5 | 2019-03-21Plasma processing apparatus
#6 | 2016-04-28Plasma processing apparatus
#7 | 2015-08-06Temperature measuring method and plasma processing system
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