Mountain View, California
United States
21
2018-02-01
The entities that hold a legal rights for patent applications filed by inventor Koelmel Blake:
Blake Koelmel from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Wafer edge measurement and control
#2 | 2014-09-18Edge ring for a thermal processing chamber
#3 | 2014-08-21Edge ring for a thermal processing chamber
#4 | 2014-04-03Edge ring lip
#5 | 2013-10-31Wafer edge measurement and control
#6 | 2013-10-24Apparatus and method for measuring radiation energy during thermal processing
#7 | 2013-08-29Non-contact substrate processing
#8 | 2013-08-15Spike anneal residence time reduction in rapid thermal processing chambers
#9 | 2013-03-07Edge ring for a thermal processing chamber
#10 | 2012-12-06APPARATUS AND METHODS FOR SUPPORTING AND CONTROLLING A SUBSTRATE
#11 | 2012-12-06Apparatus and methods for positioning a substrate using capacitive sensors
#12 | 2012-08-23Edge ring for a thermal processing chamber
#13 | 2012-08-16High temperature vacuum chuck assembly
#14 | 2012-05-17Apparatus and method of aligning and positioning a cold substrate on a hot surface
#15 | 2010-10-28Millisecond annealing (DSA) edge protection
#16 | 2010-08-12Non-contact substrate processing
#17 | 2010-01-07Apparatus and method for measuring radiation energy during thermal processing
#18 | 2009-12-03Method and apparatus for detecting the substrate temperature in a laser anneal system
#19 | 2009-11-12Method for reducing stray light in a rapid thermal processing chamber by polarization
#20 | 2009-08-20Millisecond annealing (DSA) edge protection
#21 | 2009-07-16High temperature vacuum chuck assembly
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