Son
Netherlands
16
2021-03-04
The entities that hold a legal rights for patent applications filed by inventor MOERMAN Richard:
Richard MOERMAN from Son, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus and device manufacturing method involving a heater
#2 | 2019-08-01Lithographic apparatus and device manufacturing method involving a heater
#3 | 2017-01-26Lithographic apparatus
#4 | 2016-02-18Lithographic apparatus and device manufacturing method involving a heater
#5 | 2015-08-20Lithographic apparatus
#6 | 2012-05-10Lithographic apparatus and device manufacturing method involving a heater
#7 | 2011-12-01Fluid handling structure, a lithographic apparatus and a device manufacturing method
#8 | 2010-12-23Lithographic apparatus and device manufacturing method
#9 | 2010-12-23Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor
#10 | 2010-08-26Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method
#11 | 2009-10-22Lithographic apparatus
#12 | 2009-07-02Immersion lithography
#13 | 2009-06-18Lithographic apparatus and device manufacturing method
#14 | 2008-03-20Lithographic apparatus and device manufacturing method
#15 | 2006-03-30Lithographic apparatus and device manufacturing method
#16 | 2006-02-16Lithographic apparatus and device manufacturing method having liquid evaporation control
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