Miyagi
Japan
29
2025-09-18
The entities that hold a legal rights for patent applications filed by inventor Hirose Jun:
Jun Hirose from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND MAINTENANCE METHOD
#2 | 2025-07-17PLASMA PROCESSING APPARATUS AND MOUNTING TABLE THEREOF
#3 | 2025-07-17PROCESSING SYSTEM AND PROCESSING METHOD
#4 | 2024-12-26ALUMINA CERAMIC MEMBER, METHOD FOR MANUFACTURING ALUMINA CERAMIC MEMBER, COMPONENT FOR SEMICONDUCTOR MANUFACTURING APPARATUS, AND SUBSTRATE PROCESSING APPARATUS
#5 | 2024-11-07PLASMA PROCESSING APPARATUS
#6 | 2024-10-10SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND MAINTENANCE METHOD
#7 | 2024-07-18GAS SUPPLY DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS
#8 | 2024-03-21PLASMA MONITORING SYSTEM, PLASMA MONITORING METHOD, AND MONITORING DEVICE
#9 | 2023-01-19Plasma processing apparatus and mounting table thereof
#10 | 2022-07-07VACUUM PROCESSING APPARATUS AND MAINTENANCE APPARATUS
#11 | 2022-04-28PROCESSING SYSTEM AND PROCESSING METHOD
#12 | 2022-04-21Substrate processing apparatus, substrate processing system, and maintenance method
#13 | 2021-12-30SUBSTRATE PROCESSING APPARATUS
#14 | 2021-11-04Processing system
#15 | 2021-08-19SUBSTRATE PROCESSING METHOD, GAS FLOW EVALUATION SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
#16 | 2021-01-07Plasma etching method and plasma processing device
#17 | 2020-12-24Maintenance device
#18 | 2020-11-19Substrate support and plasma processing apparatus
#19 | 2020-07-09Plasma processing apparatus and mounting table thereof
#20 | 2019-06-27PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
#21 | 2019-02-28Assembly provided with coolant flow channel, method of controlling assembly provided with coolant flow channel, and substrate processing apparatus
#22 | 2019-02-28Method of inspecting flow rate measuring system
#23 | 2018-12-06Plasma processing method
#24 | 2018-12-06Plasma processing apparatus and plasma control method
#25 | 2018-08-16Vacuum processing apparatus and maintenance apparatus
#26 | 2018-03-01Plasma processing apparatus
#27 | 2017-09-14Method of arranging treatment process
#28 | 2015-09-10Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method
#29 | 2012-03-15Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method
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