Nirasaki
Japan
3
2015-09-10
The entities that hold a legal rights for patent applications filed by inventor Inai Kensuke:
Kensuke Inai from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate cleaning method, substrate cleaning apparatus and vacuum processing system
#2 | 2014-08-14Cleaning method, processing apparatus, and storage medium
#3 | 2012-10-04Substrate cleaning apparatus and vacuum processing system
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