Aurora, Illinois
United States
14
2015-09-17
The entities that hold a legal rights for patent applications filed by inventor CHEN Zhan:
Zhan CHEN from Aurora, US has applied for patents for these inventions. The list has both pending applications and granted patents:
COMPOSITIONS AND METHODS FOR CMP OF TUNGSTEN MATERIALS
#2 | 2012-11-08Compositions for polishing silicon-containing substrates
#3 | 2010-08-12Oxidation-stabilized CMP compositions and methods
#4 | 2010-07-29COMPOSITIONS AND METHODS FOR CHEMICAL-MECHANICAL POLISHING OF PHASE CHANGE MATERIALS
#5 | 2010-02-04Methods and compositions for polishing silicon-containing substrates
#6 | 2009-04-09Low-temperature catalyzed formation of segmented nanowire of dielectric material
#7 | 2008-09-11Silicon oxide polishing method utilizing colloidal silica
#8 | 2008-03-13Onium-containing CMP compositions and methods of use thereof
#9 | 2008-01-24Rate-enhanced CMP compositions for dielectric films
#10 | 2007-12-27Compositions and methods for polishing silicon nitride materials
#11 | 2007-11-13Tunable selectivity slurries in CMP applications
#12 | 2007-09-20Oxidation-stabilized CMP compositions and methods
#13 | 2007-09-13Composition and method to polish silicon nitride
#14 | 2007-01-04Low-temperature catalyzed formation of segmented nanowire of dielectric material
1289337 ⎘