Edwin Johan Buis

FUEL DROPLET NOZZLE ASSEMBLY

APPARATUS FOR SUPPLYING LIQUID TARGET MATERIAL TO A RADIATION SOURCE

Droplet generator nozzle

Arrangement for the actuation of at least one element in an optical system

Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices

Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices

Planar motor and lithographic apparatus comprising such planar motor

Actuator

Illumination system, lithographic apparatus and method of adjusting an illumination mode

Optical apparatus, and method of orienting a reflective element

Mountings for rotation of array of reflective elements and lithographic apparatus incorporating same

Lithographic apparatus and method

Actuator system, lithographic apparatus, method of controlling the position of a component and device manufacturing method

Object support positioning device and lithographic apparatus

Lithographic apparatus with rotation filter device

Lithographic support structure

Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method

Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device

Lithographic support structure

Lithographic apparatus and device manufacturing method

Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method

Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method and device manufactured thereby

Lithographic apparatus, device manufacturing method and positioning system