Tokyo
Japan
5
2015-10-08
The entities that hold a legal rights for patent applications filed by inventor ONO Haruko:
Haruko ONO from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD AND APPARATUS FOR CLEANING SUBSTRATE
#2 | 2011-09-01Method and apparatus for cleaning substrate
#3 | 2009-08-25Apparatus for and method of processing substrate
#4 | 2007-12-18Substrate processing method
#5 | 2007-09-27Substrate processing method and substrate processing apparatus
1316975 ⎘