Ebara Corporation

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE POLISHING APPARATUS

#2 | 2026-05-28

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INFORMATION PROCESSING APPARATUS

#3 | 2026-05-14

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PUMP

#4 | 2026-04-23

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SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING METHOD

#5 | 2026-03-05

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POLISHING APPARATUS AND METHOD FOR CONTROLLING POLISHING APPARATUS

#6 | 2026-01-08

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POLISHING METHOD AND POLISHING DEVICE

#7 | 2025-12-25

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PROCESSING APPARATUS

#8 | 2025-12-18

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CHEMICAL LIQUID SUPPLY DEVICE, CLEANING SYSTEM AND LIQUID SUPPLY METHOD

#9 | 2025-12-04

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SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIA

#10 | 2025-12-04

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SUBSTRATE POLISHING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

#11 | 2025-11-20

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SUBSTRATE DRYING DEVICE AND SUBSTRATE DRYING METHOD

#12 | 2025-11-06 ✅ Patent 12,595,799 granted on 2026-04-07

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METHOD OF STARTING AND STOPPING PUMP APPARATUSES COUPLED IN SERIES

#13 | 2025-10-16

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MACHINE-LEARNING METHOD AND MACHINE-LEARNING APPARATUS

#14 | 2025-10-09

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METAL-SUPPORTING NONWOVEN FABRIC AND PRODUCTION METHOD THEREOF, CATALYST, UNSATURATED COMPOUND HYDROGENATION METHOD, AND CARBON-CARBON BOND FORMING METHOD

#15 | 2025-09-04

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SUBSTRATE CLEANING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE CLEANING METHOD, CLEANING METHOD FOR CLEANING TOOL, A NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM STORING, A SUBSTRATE CLEANING PROGRAM AND A NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM STORING A CLEANING PROGRAM

#16 | 2025-08-14

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SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS

#17 | 2025-07-24

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CHEMICAL MECHANICAL POLISHING PROCESS AND CHEMICAL MECHANICAL POLISHING COMPOSITION

#18 | 2025-07-03

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SUPPORT MECHANISM FOR ROLL CLEANING MEMBER AND CLEANING DEVICE

#19 | 2025-06-26

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SEMICONDUCTOR PROCESSING DEVICE AND POLISHING DEVICE

#20 | 2025-06-12

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SUBSTRATE GRIPPING APPARATUS

#21 | 2025-06-12

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FLUID SUPPLY DEVICE

#22 | 2025-05-15

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INFORMATION PROCESSING APPARATUS, INFERENCE APPARATUS, MACHINE-LEARNING APPARATUS, INFORMATION PROCESSING METHOD, INFERENCE METHOD, AND MACHINE-LEARNING METHOD

#23 | 2025-05-08

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SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

#24 | 2025-05-08

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SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

#25 | 2025-04-24 ✅ Patent 12,544,994 granted on 2026-02-10

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SUBSTRATE PROCESSING METHOD

#26 | 2025-04-24

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POLISHING APPARATUS

#27 | 2025-04-17

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INFORMATION PROCESSING APPARATUS, INFERENCE APPARATUS, MACHINE-LEARNING APPARATUS, INFORMATION PROCESSING METHOD, INFERENCE METHOD, AND MACHINE-LEARNING METHOD

#28 | 2025-03-13

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ABRASION DETECTION DEVICE, ABRASION DETECTION METHOD, SUBSTRATE CLEANING DEVICE, AND SUBSTRATE CLEANING METHOD

#29 | 2025-03-06

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CLEANING METHOD AND APPARATUS FOR WASHING TOOL, SUBSTRATE WASHING APPARATUS AND MANUFACTURING METHOD FOR WASHING TOOL

#30 | 2025-03-06 ✅ Patent 12,516,437 granted on 2026-01-06

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METHOD OF PLATING AND APPARATUS FOR PLATING

#31 | 2025-03-06 ✅ Patent 12,606,929 granted on 2026-04-21

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PLATING APPARATUS AND SUBSTRATE CLEANING METHOD

#32 | 2025-03-06 ✅ Patent 12,442,102 granted on 2025-10-14

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APPARATUS FOR PLATING AND METHOD OF PLATING

#33 | 2025-01-30 ✅ Patent 12,546,026 granted on 2026-02-10

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PLATING APPARATUS AND PLATING METHOD

#34 | 2025-01-09 ✅ Patent 12,351,933 granted on 2025-07-08

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PLATING METHOD AND PLATING APPARATUS

#35 | 2025-01-09

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POLISHING APPARATUS AND POLISHING METHOD

#36 | 2024-12-26

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POLISHING METHOD, POLISHING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

#37 | 2024-11-28

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INFORMATION PROCESSING APPARATUS, INFERENCE APPARATUS, MACHINE-LEARNING APPARATUS, INFORMATION PROCESSING METHOD, INFERENCE METHOD, AND MACHINE-LEARNING METHOD

#38 | 2024-11-21 ✅ Patent 12,594,583 granted on 2026-04-07

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SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, AND MAINTENANCE METHOD FOR SUBSTRATE CLEANING DEVICE

#39 | 2024-11-14

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CLEANING AND TRANSFER EQUIPMENT, WAFER TREATMENT EQUIPMENT, TRANSFER EQUIPMENT, AND CLEANING AND TRANSFER METHODS

#40 | 2024-11-07 ✅ Patent 12,221,712 granted on 2025-02-11

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Plating apparatus

#41 | 2024-10-31

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INFORMATION PROCESSING DEVICE, INFERENCE DEVICE, AND MACHINE LEARNING DEVICE

#42 | 2024-10-31 ✅ Patent 12,429,058 granted on 2025-09-30

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PURGE APPARATUS AND PURGE METHOD

#43 | 2024-10-10

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INFORMATION PROCESSING DEVICE, INFERENCE DEVICE, AND MACHINE LEARNING DEVICE

#44 | 2024-10-03 ✅ Patent 12,510,081 granted on 2025-12-30

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PUMP CASING AND PUMP

#45 | 2024-09-26 ✅ Patent 12,577,699 granted on 2026-03-17

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METHOD OF LIQUID MANAGEMENT IN ANODE CHAMBER AND APPARATUS FOR PLATING

#46 | 2024-09-26 ✅ Patent 12,644,198 granted on 2026-06-02

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PLATING APPARATUS

#47 | 2024-09-26

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SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL METHOD, AND PROGRAM

#48 | 2024-09-19

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COVER ASSEMBLY, CLEANING METHOD, AND METHOD FOR MANUFACTURING COVER ASSEMBLY

#49 | 2024-09-12

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INFORMATION PROCESSING DEVICE, SUBSTRATE PROCESSING DEVICE, AND INFORMATION PROCESSING METHOD

#50 | 2024-09-12 ✅ Patent 12,344,954 granted on 2025-07-01

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PLATING APPARATUS

#51 | 2024-08-22 ✅ Patent 12,406,874 granted on 2025-09-02

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SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING SUBSTRATE HOLDING APPARATUS, AND SUBSTRATE PROCESSING METHOD

#52 | 2024-08-15 ✅ Patent 12,624,472 granted on 2026-05-12

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PLATING APPARATUS

#53 | 2024-08-15 ✅ Patent 12,649,176 granted on 2026-06-09

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WASHING APPARATUS

#54 | 2024-07-25 ✅ Patent 12,331,420 granted on 2025-06-17

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PLATING APPARATUS AND PLATING METHOD

#55 | 2024-07-25 ✅ Patent 12,480,221 granted on 2025-11-25

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PRE-WET PROCESS METHOD

#56 | 2024-07-18

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INFORMATION PROCESSING DEVICE AND INFORMATION PROCESSING METHOD

#57 | 2024-07-04 ✅ Patent 12,378,689 granted on 2025-08-05

US20240218552A1

PLATING APPARATUS AND CONTACT CLEANING METHOD

#58 | 2024-06-27

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SEMICONDUCTOR WAFER DETECTION DEVICE AND DROPLET GUIDE MEMBER

#59 | 2024-06-27 ✅ Patent 12,571,767 granted on 2026-03-10

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EDDY CURRENT SENSOR, POLISHING APPARATUS, AND FILM THICKNESS DETECTION METHOD

#60 | 2024-06-27 ✅ Patent 12,630,939 granted on 2026-05-19

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PLATING METHOD AND PLATING APPARATUS

#61 | 2024-06-27 ✅ Patent 12,351,932 granted on 2025-07-08

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PLATING PROCESS METHOD

#62 | 2024-06-27 ✅ Patent 12,577,698 granted on 2026-03-17

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PLATING APPARATUS

#63 | 2024-06-27 ✅ Patent 12,264,406 granted on 2025-04-01

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Plating apparatus and substrate cleaning method

#64 | 2024-06-27

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SUBSTRATE ROTATION PROCESSING DEVICE AND SUBSTRATE POLISHING DEVICE

#65 | 2024-06-27

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POLISHING DEVICE AND METHOD FOR ADJUSTING PRESSURE CONTROL UNIT

#66 | 2024-06-13 ✅ Patent 12,205,831 granted on 2025-01-21

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Cleaning apparatus and polishing apparatus

#67 | 2024-06-13

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POLISHING PAD, POLISHING APPARATUS, AND POLISHING METHOD

#68 | 2024-06-06 ✅ Patent 12,084,783 granted on 2024-09-10

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Plating apparatus and rinse process method

#69 | 2024-06-06 ✅ Patent 12,258,673 granted on 2025-03-25

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Plating apparatus

#70 | 2024-05-30 ✅ Patent 12,416,092 granted on 2025-09-16

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PLATING APPARATUS

#71 | 2024-05-02

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SUBSTRATE PROCESSING APPARATUS

#72 | 2024-05-02 ✅ Patent 12,569,891 granted on 2026-03-10

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SUBSTRATE PROCESSING DEVICE, POLISHING DEVICE, AND SUBSTRATE PROCESSING METHOD

#73 | 2024-04-11 ✅ Patent 12,656,097 granted on 2026-06-16

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OUTPUT SIGNAL PROCESSING DEVICE FOR EDDY-CURRENT SENSOR

#74 | 2024-04-11

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POLISHING APPARATUS

#75 | 2024-03-28 ✅ Patent 12,510,349 granted on 2025-12-30

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METHOD OF DETECTING ABNORMALITY IN MEASURING OF FILM THICKNESS OF WORKPIECE, OPTICAL FILM-THICKNESS MEASURING APPARATUS, AND STORAGE MEDIUM STORING PROGRAM

#76 | 2024-03-28 ✅ Patent 12,617,019 granted on 2026-05-05

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AM APPARATUS

#77 | 2024-03-14

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SUBSTRATE PROCESSING APPARATUS AND PROTECTIVE LAYER FORMING METHOD

#78 | 2024-03-14 ✅ Patent 12,454,978 granted on 2025-10-28

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MAGNETIC BEARING APPARATUS

#79 | 2024-03-07 ✅ Patent 12,123,714 granted on 2024-10-22

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Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensor

#80 | 2024-03-07 ✅ Patent 12,577,952 granted on 2026-03-17

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INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, PROGRAM, SUBSTRATE PROCESSING APPARATUS, CRITERION DATA DETERMINATION APPARATUS, AND CRITERION DATA DETERMINATION METHOD

#81 | 2024-03-07 ✅ Patent 12,370,578 granted on 2025-07-29

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SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

#82 | 2024-02-22

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INFORMATION PROCESSING APPARATUS AND MACHINE LEARNING APPARATUS

#83 | 2024-02-15 ✅ Patent 12,569,957 granted on 2026-03-10

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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#84 | 2024-02-15 ✅ Patent 12,076,760 granted on 2024-09-03

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Pre-wet module, deaerated liquid circulation system, and pre-wet method

#85 | 2024-02-15 ✅ Patent 12,358,028 granted on 2025-07-15

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CLEANING APPARATUS FOR CLEANING MEMBER, CLEANING METHOD FOR CLEANING MEMBER, AND SUBSTRATE CLEANING METHOD

#86 | 2024-02-08 ✅ Patent 12,347,697 granted on 2025-07-01

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PREWET MODULE AND PREWET METHOD

#87 | 2024-02-08 ✅ Patent 12,547,154 granted on 2026-02-10

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SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER READABLE MEDIUM

#88 | 2024-01-25 ✅ Patent 12,251,738 granted on 2025-03-18

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Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing tool

#89 | 2024-01-11

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MACHINE LEARNING APPARATUS, SLIDING-SURFACE DIAGNOSIS APPARATUS, INFERENCE APPARATUS, MACHINE LEARNING METHOD, MACHINE LEARNING PROGRAM, SLIDING-SURFACE DIAGNOSIS METHOD, SLIDING-SURFACE DIAGNOSIS PROGRAM, INFERENCE METHOD, AND INFERENCE PROGRAM

#90 | 2024-01-04 ✅ Patent 12,226,825 granted on 2025-02-18

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Buffer chamber and AM system including a buffer chamber

#91 | 2024-01-04 ✅ Patent 12,403,507 granted on 2025-09-02

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TRANSFER APPARATUS, CLEANING MODULE, AND SUBSTRATE PROCESSING APPARATUS

#92 | 2023-12-28 ✅ Patent 12,257,666 granted on 2025-03-25

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Surface height measurement method using dummy disk

#93 | 2023-12-21 ✅ Patent 12,350,787 granted on 2025-07-08

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SUBSTRATE PROCESSING APPARATUS

#94 | 2023-12-14 ✅ Patent 12,623,291 granted on 2026-05-12

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POWDER SUPPLY APPARATUS AND AM APPARATUS USING A POWDER SUPPLY APPARATUS

#95 | 2023-12-07 ✅ Patent 12,656,280 granted on 2026-06-16

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METHOD OF EVALUATING PRIMARY OPTICAL SYSTEM OF ELECTRON BEAM OBSERVATION DEVICE, EVALUATION DEVICE USED THEREFOR, AND METHOD OF MANUFACTURING SAME

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METHOD FOR ESTIMATING LIFE OF POLISHING PAD AND POLISHING DEVICE

#97 | 2023-11-09

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CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTRATE CLEANING APPARATUS

#98 | 2023-11-09

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INFORMATION PROCESSING DEVICE, INFERENCE DEVICE, MACHINE LEARNING DEVICE, SUBSTRATE PLATING DEVICE, INFORMATION PROCESSING METHOD, INFERENCE METHOD, AND MACHINE LEARNING METHOD

#99 | 2023-10-26 ✅ Patent 12,134,833 granted on 2024-11-05

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Plating apparatus and cleaning method of contact member of plating apparatus

#100 | 2023-10-12 ✅ Patent 11,996,303 granted on 2024-05-28

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