Dublin, California
United States
15
2025-07-31
The entities that hold a legal rights for patent applications filed by inventor AGARWAL Sumit:
Sumit AGARWAL from Dublin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
CRYOGENIC ETCHING OF SILICON-CONTAINING MATERIALS
#2 | 2022-12-15Gas quench for diffusion bonding
#3 | 2022-12-01GAS DISTRIBUTION PLATE WITH HIGH ASPECT RATIO HOLES AND A HIGH HOLE DENSITY
#4 | 2022-10-20Fabrication of a high temperature showerhead
#5 | 2022-04-14Methods to fabricate chamber component holes using laser drilling
#6 | 2022-04-14Methods to fabricate chamber component holes using laser drilling
#7 | 2022-02-24Fabricating a recursive flow gas distribution stack using multiple layers
#8 | 2020-10-01Gas distribution plate with high aspect ratio holes and a high hole density
#9 | 2020-09-17Lid assembly apparatus and methods for substrate processing chambers
#10 | 2020-09-10Porous showerhead for a processing chamber
#11 | 2016-04-07METHODS FOR ETCHING A BARRIER LAYER FOR AN INTERCONNECTION STRUCTURE FOR SEMICONDUCTOR APPLICATIONS
#12 | 2016-04-07Methods for cyclically etching a metal layer for an interconnection structure for semiconductor applications
#13 | 2016-03-17METHOD FOR ETCHING A HARDMASK LAYER FOR AN INTERCONNECTION STRUCTURE FOR SEMICONDUCTOR APPLICATIONS
#14 | 2016-03-17Methods for etching a hardmask layer for an interconnection structure for semiconductor applications
#15 | 2015-10-08Methods for etching a metal layer to form an interconnection structure for semiconductor applications
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