Tokyo
Japan
26
2022-03-17
The entities that hold a legal rights for patent applications filed by inventor Ui Akio:
Akio Ui from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Dielectric barrier discharge electrode and dielectric barrier discharge device
#2 | 2021-10-14Plasma processing apparatus and plasma processing method
#3 | 2019-09-19GAS PROCESSING APPARATUS
#4 | 2019-08-22PLASMA ACTUATOR AND SURFACE CLEANING DEVICE
#5 | 2018-05-24Dry etching method and method for manufacturing semiconductor device
#6 | 2018-03-22Dust collector and air conditioner
#7 | 2018-01-11Plasma processing apparatus and plasma processing method
#8 | 2017-06-29PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHDO
#9 | 2017-06-15PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHDO
#10 | 2017-01-19Plasma induced flow electrode structure, plasma induced flow generation device, and method of manufacturing plasma induced flow electrode structure
#11 | 2017-01-12Gas Processing Apparatus
#12 | 2016-07-07Device manufacturing apparatus and manufacturing method of magnetic device using structure to pass ion beam
#13 | 2015-09-24Gas processing apparatus
#14 | 2015-06-11Substrate processing apparatus and substrate processing method
#15 | 2014-03-27Plasma processing apparatus and plasma processing method
#16 | 2013-03-14METHOD OF CLEANING FILM FORMING APPARATUS
#17 | 2012-09-13Substrate processing apparatus and substrate processing method
#18 | 2012-04-05Substrate processing method and substrate processing apparatus
#19 | 2011-09-15METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS
#20 | 2010-03-25SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#21 | 2009-08-06Substrate plasma processing apparatus and plasma processing method
#22 | 2009-03-26Plasma processing apparatus and plasma processing method
#23 | 2008-10-02Plasma processing apparatus of substrate and plasma processing method thereof
#24 | 2008-03-06Method for plasma processing a substrate
#25 | 2008-03-06Plasma processing apparatus of substrate and plasma processing method thereof
#26 | 2005-09-01Film forming ring and method of manufacturing semiconductor device
133092 ⎘