Inventor profile of:

Akio Ui

City:

Tokyo

Country:

Japan

Published Applications:

26

Last publication date:

2022-03-17

Top Assignees for applications by Akio Ui

The entities that hold a legal rights for patent applications filed by inventor Ui Akio:

Recent patent applications by Ui Akio

Akio Ui from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2022-03-17
US20220087001A1
Electricity

Dielectric barrier discharge electrode and dielectric barrier discharge device

#2 | 2021-10-14
US20210319986A1
Electricity

Plasma processing apparatus and plasma processing method

#3 | 2019-09-19
US20190282722A1
Human necessities

GAS PROCESSING APPARATUS

#4 | 2019-08-22
US20190259579A1
Electricity

PLASMA ACTUATOR AND SURFACE CLEANING DEVICE

#5 | 2018-05-24
US20180145086A1
Electricity

Dry etching method and method for manufacturing semiconductor device

#6 | 2018-03-22
US20180078950A1
Performing operations; transporting

Dust collector and air conditioner

#7 | 2018-01-11
US20180012768A1
Electricity

Plasma processing apparatus and plasma processing method

#8 | 2017-06-29
US20170186589A1
Electricity

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHDO

#9 | 2017-06-15
US20170169996A1
Electricity

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHDO

#10 | 2017-01-19
US20170018409A1
Electricity

Plasma induced flow electrode structure, plasma induced flow generation device, and method of manufacturing plasma induced flow electrode structure

#11 | 2017-01-12
US20170007958A1
Performing operations; transporting

Gas Processing Apparatus

#12 | 2016-07-07
US20160196951A1
Electricity

Device manufacturing apparatus and manufacturing method of magnetic device using structure to pass ion beam

#13 | 2015-09-24
US20150265740A1
Human necessities

Gas processing apparatus

#14 | 2015-06-11
US20150162223A1
Electricity

Substrate processing apparatus and substrate processing method

#15 | 2014-03-27
US20140083977A1
Electricity

Plasma processing apparatus and plasma processing method

#16 | 2013-03-14
US20130061870A1
Performing operations; transporting

METHOD OF CLEANING FILM FORMING APPARATUS

#17 | 2012-09-13
US20120228263A1
Electricity

Substrate processing apparatus and substrate processing method

#18 | 2012-04-05
US20120080408A1
Electricity

Substrate processing method and substrate processing apparatus

#19 | 2011-09-15
US20110223750A1
Electricity

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS

#20 | 2010-03-25
US20100072172A1
Electricity

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#21 | 2009-08-06
US20090194508A1
Electricity

Substrate plasma processing apparatus and plasma processing method

#22 | 2009-03-26
US20090078678A1
Electricity

Plasma processing apparatus and plasma processing method

#23 | 2008-10-02
US20080237185A1
Electricity

Plasma processing apparatus of substrate and plasma processing method thereof

#24 | 2008-03-06
US20080057222A1
Electricity

Method for plasma processing a substrate

#25 | 2008-03-06
US20080053818A1
Electricity

Plasma processing apparatus of substrate and plasma processing method thereof

#26 | 2005-09-01
US20050191811A1
Electricity

Film forming ring and method of manufacturing semiconductor device

InventorID:

133092 ⎘