Georgetown, Massachusetts
United States
16
2013-03-14
The entities that hold a legal rights for patent applications filed by inventor Hamelin Thomas:
Thomas Hamelin from Georgetown, US has applied for patents for these inventions. The list has both pending applications and granted patents:
HIGH THROUGHPUT PROCESSING SYSTEM FOR CHEMICAL TREATMENT AND THERMAL TREATMENT AND METHOD OF OPERATING
#2 | 2011-08-25PROCESSING SYSTEM AND METHOD FOR CHEMICALLY TREATING A SUBSTRATE
#3 | 2010-02-04High throughput thermal treatment system and method of operating
#4 | 2010-02-04High throughput processing system for chemical treatment and thermal treatment and method of operating
#5 | 2009-09-10Reduced maintenance chemical oxide removal (COR) processing system
#6 | 2007-10-11Post-etch treatment system for removing residue on a substrate
#7 | 2007-10-11Gas distribution system for a post-etch treatment system
#8 | 2007-09-27Substrate holder having a fluid gap and method of fabricating the substrate holder
#9 | 2007-05-08Method and apparatus for thermally insulating adjacent temperature controlled processing chambers
#10 | 2006-07-18Processing system and method for thermally treating a substrate
#11 | 2006-06-22Processing system and method for treating a substrate
#12 | 2006-04-18Processing system and method for treating a substrate
#13 | 2005-12-08Processing system and method for treating a substrate
#14 | 2005-10-04Processing system and method for chemically treating a substrate
#15 | 2005-09-29Processing system and method for chemically treating a substrate
#16 | 2005-03-31Method and apparatus for efficient temperature control using a contact volume
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