Joseph C. Olson

FORMATION OF ANGLED GRATINGS

Ion Beam-Induced Epitaxial Crystallization on an Integrated Processing Architecture

Workpiece Processing System with Multiple Beam Angles

IN-SITU ION BEAM ANGLE MEASUREMENT

HYBRID APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

APPARATUS AND TECHNIQUES FOR SUBSTRATE PROCESSING USING INDEPENDENT ION SOURCE AND RADICAL SOURCE

MULTIPROCESS SUBSTRATE TREATMENT FOR ENHANCED SUBSTRATE DOPING

System And Methods Using An Inline Surface Engineering Source

Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions

Variable Rotation Rate Batch Implanter

Modulation of rolling k vectors of angled gratings

Forming variable depth structures with laser ablation

Cyclotron having continuously variable energy output

Spinning disk with electrostatic clamped platens for ion implantation

FORMATION OF ANGLED GRATINGS

CONTROLLING ETCH ANGLES BY SUBSTRATE ROTATION IN ANGLED ETCH TOOLS

SHADOW MASK APPARATUS AND METHODS FOR VARIABLE ETCH DEPTHS

Method of forming a plurality of gratings

Electrodynamic mass analysis with RF biased ion source

TECHNIQUES FOR VARIABLE DEPOSITION PROFILES

DEVICES AND METHODS FOR VARIABLE ETCH DEPTHS

Handling and processing double-sided devices on fragile substrates

Apparatus and techniques for angled etching using multielectrode extraction source

Apparatus and system including high angle extraction optics

Methods for variable etch depths

Controlling etch angles by substrate rotation in angled etch tools

System and methods using an inline surface engineering source

In situ angle measurement using channeling

Shadow mask apparatus and methods for variable etch depths

Etch improvement

Apparatus and techniques for substrate processing using independent ion source and radical source

Methods of producing slanted gratings with variable etch depths

Modulation of rolling k vectors of angled gratings

Optical component having variable depth gratings and method of formation

BEAMLINE ARCHITECTURE WITH INTEGRATED PLASMA PROCESSING

Methods of producing slanted gratings with variable etch depths

Apparatus, system and techniques for mass analyzed ion beam

Handling and processing double-sided devices on fragile substrates

Modulation of ion beam angle

Modulation of rolling K vectors of angled gratings

Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions

Ion beam source for optical device fabrication using a segmented ion source having one or more angled surfaces

Method of forming a plurality of gratings

Methods of optical device fabrication using an ion beam source

Method of forming gratings

Methods of forming devices on a substrate

Methods for controlling etch depth by localized heating

Gate all around device and method of formation using angled ions

Apparatus and techniques for angled etching using multielectrode extraction source

System and method for detecting etch depth of angled surface relief gratings

System and method for forming surface relief gratings

Formation of angled gratings

Optical component having depth modulated angled gratings and method of formation

Techniques for forming angled structures

Gate all around device and method of formation using angled ions

System and methods using an inline surface engineering source

Optical component having variable depth gratings and method of formation

Controlling etch angles by substrate rotation in angled etch tools

Electrodynamic mass analysis

Modifying bulk properties of a glass substrate

Workpiece Processing Method And Apparatus

Electric/magnetic field guided acid diffusion

Ion beam uniformity control using ion beam blockers

Plasma cathode charged particle lithography system

Apparatus to control an ion beam

Dual stage scanner for ion beam control

Dual mode ion implanter

Apparatus and techniques for controlling ion implantation uniformity

Apparatus and techniques for controlling ion implantation uniformity

Apparatus and techniques for controlling ion angular spread

Inductively coupled plasma ion source with multiple antennas for wide ion beam

Double ended electrode manipulator

Apparatus and method for controllably implanting workpieces

Method and system for controlling critical dimension and roughness in resist features

High-throughput ion implanter

Method and system for modifying resist openings using multiple angled ions

Method and system for controlling critical dimension and roughness in resist features

Apparatus and method for multiple slot ion implantation

Platen control

Method and system for modifying patterned photoresist using multi-step ion implantation

Ion beam tuning

UNIFORMITY CONTROL USING ION BEAM BLOCKERS

Ion source

Apparatus and system for controlling ion ribbon beam uniformity in an ion implanter

Apparatus and method for controllably implanting workpieces

TECHNIQUES FOR MAKING HIGH VOLTAGE CONNECTIONS

Mass analysis magnet for a ribbon beam

TECHNIQUES FOR ATOMIC LAYER DEPOSITION

METHOD OF DETERMINING ANGLE MISALIGNMENT IN BEAM LINE ION IMPLANTERS

ENERGY CONTAMINATION MONITOR WITH NEUTRAL CURRENT DETECTION

Apparatus for measuring beam characteristics and a method thereof

High tilt implant angle performance using in-axis tilt

RF electron source for ionizing gas clusters

Techniques for making high voltage connections

Techniques for controlling a charged particle beam

TECHNIQUES FOR TERMINAL INSULATION IN AN ION IMPLANTER

Techniques for providing ion source feed materials

Techniques for providing a ribbon-shaped gas cluster ion beam

Ion implantation device with a dual pumping mode and method thereof