Nirasaki
Japan
8
2024-10-24
The entities that hold a legal rights for patent applications filed by inventor TSUDA Einosuke:
Einosuke TSUDA from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Electrostatic Chuck and Method of Operation for Plasma Processing
#2 | 2022-01-13Stage device and substrate processing apparatus
#3 | 2021-09-30Substrate stage and substrate processing apparatus
#4 | 2020-07-30Method of controlling substrate treatment apparatus, substrate treatment apparatus, and cluster system
#5 | 2019-06-13Source material container
#6 | 2018-12-20Substrate processing apparatus and substrate loading mechanism
#7 | 2015-11-12SUBSTRATE PROCESSING APPARATUS
#8 | 2012-02-09Gas exhaust system of film-forming apparatus, film-forming apparatus, and method for processing exhaust gas
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