Berkeley, California
United States
14
2025-08-28
The entities that hold a legal rights for patent applications filed by inventor Kalinovski Ilia:
Ilia Kalinovski from Berkeley, US has applied for patents for these inventions. The list has both pending applications and granted patents:
LIQUID-COOLED OPTICAL WINDOW FOR SEMICONDUCTOR PROCESSING CHAMBER
#2 | 2025-07-03RADIATIVE HEAT WINDOWS AND WAFER SUPPORT PADS IN VAPOR ETCH REACTORS
#3 | 2025-07-03DUAL SENSOR WAFER TEMPERATURE MEASUREMENT SYSTEM
#4 | 2022-11-10VAPOR CLEANING OF SUBSTRATE SURFACES
#5 | 2018-03-29Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system
#6 | 2018-01-04Substrate processing method for depositing a barrier layer to prevent photoresist poisoning
#7 | 2016-04-07Systems and methods for drying high aspect ratio structures without collapse using sacrificial bracing material that is removed using hydrogen-rich plasma
#8 | 2015-11-19Ultra low silicon loss high dose implant strip
#9 | 2012-05-03SHOWERHEAD CONFIGURATIONS FOR PLASMA REACTORS
#10 | 2011-11-15Photoresist strip method for low-k dielectrics
#11 | 2011-06-16ULTRA LOW SILICON LOSS HIGH DOSE IMPLANT STRIP
#12 | 2011-06-16Enhanced passivation process to protect silicon prior to high dose implant strip
#13 | 2009-09-08Photoresist strip method for low-k dielectrics
#14 | 2007-10-30Photoresist strip method for low-k dielectrics
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