Martin Ebert

City:

Valkenswaard

Country:

Netherlands

Published Applications:

Last publication date:

2023-06-15

Top Assignees for applications by Martin Ebert

The entities that hold a legal rights for patent applications filed by inventor Ebert Martin:

ASML Netherlands B.V. 10 Veldhoven, Netherlands
ASML NETHERLAND B.V. 1 Veldhoven, Netherlands

Recent patent applications by Ebert Martin

Martin Ebert from Valkenswaard, NL has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2023-06-15

US20230185990A1

Physics

Method and apparatus for inspection and metrology

#2 | 2021-02-25

US20210055663A1

Physics

Method and apparatus for illumination adjustment

#3 | 2019-02-28

US20190064677A1

Physics

Metrology method, target and substrate

#4 | 2018-12-20

US20180364590A1

Physics

POLARIZATION TUNING IN SCATTEROMETRY

#5 | 2018-03-29

US20180088347A1

Physics

Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method

#6 | 2018-02-15

US20180046737A1

Physics

Method and apparatus for inspection and metrology

#7 | 2017-06-29

US20170184977A1

Physics

Metrology method, target and substrate

#8 | 2017-03-30

US20170090302A1

Physics

Metrology method, target and substrate

#9 | 2016-01-28

US20160025992A1

Physics

Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method

#10 | 2011-02-03

US20110026032A1

Physics

Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatus

InventorID:

1425180 ⎘