Los Altos, California
United States
32
2026-04-23
The entities that hold a legal rights for patent applications filed by inventor BABAYAN Steven E.:
Steven E. BABAYAN from Los Altos, US has applied for patents for these inventions. The list has both pending applications and granted patents:
SEMICONDUCTOR SYMMETRIC PROCESS CHAMBER ARCHITECTURE
#2 | 2024-12-26WAFER EDGE RING LIFTING SOLUTION
#3 | 2024-09-26TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
#4 | 2023-04-20REPLACEABLE ELECTROSTATIC CHUCK OUTER RING FOR EDGE ARCING MITIGATION
#5 | 2022-12-22Method and apparatus for determining a position of a ring within a process kit
#6 | 2022-10-06Wafer edge ring lifting solution
#7 | 2022-08-18Semiconductor processing with cooled electrostatic chuck
#8 | 2021-12-23In-situ optical chamber surface and process sensor
#9 | 2021-11-11In-situ apparatus for semiconductor process module
#10 | 2021-10-28SUBSTRATE CARRIER WITH ARRAY OF INDEPENDENTLY CONTROLLABLE HEATER ELEMENTS
#11 | 2021-03-18Cryogenic electrostatic chuck
#12 | 2020-10-08In-situ optical chamber surface and process sensor
#13 | 2020-07-16Thermal repeatability and in-situ showerhead temperature monitoring
#14 | 2020-06-11Cryogenic electrostatic chuck
#15 | 2020-05-14Tunable temperature controlled substrate support assembly
#16 | 2020-05-14SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTANT SEAL
#17 | 2020-01-30Azimuthally tunable multi-zone electrostatic chuck
#18 | 2019-12-26METHODS AND APPARATUS FOR ENHANCED FLOW DETECTION REPEATABILITY OF THERMAL-BASED MASS FLOW CONTROLLERS (MFCS)
#19 | 2019-09-05PRECISION SCREEN PRINTING WITH SUB-MICRON UNIFORMITY OF METALLIZATION MATERIALS ON GREEN SHEET CERAMIC
#20 | 2019-03-21In-situ apparatus for semiconductor process module
#21 | 2018-07-05Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)
#22 | 2018-05-24Thermal repeatability and in-situ showerhead temperature monitoring
#23 | 2018-05-03ENDPOINT GAS LINE FILTER FOR SUBSTRATE PROCESSING EQUIPMENT
#24 | 2018-03-01PLASMA SCREEN FOR PLASMA PROCESSING CHAMBER
#25 | 2018-03-01LOW PRESSURE LIFT PIN CAVITY HARDWARE
#26 | 2018-02-22SUBSTRATE CARRIER WITH ARRAY OF INDEPENDENTLY CONTROLLABLE HEATER ELEMENTS
#27 | 2018-02-08Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic
#28 | 2018-01-18SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTANT SEAL
#29 | 2017-07-27Wafer edge ring lifting solution
#30 | 2016-11-24Azimuthally tunable multi-zone electrostatic chuck
#31 | 2016-11-10Tunable temperature controlled substrate support assembly
#32 | 2016-01-28Tunable temperature controlled substrate support assembly
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