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Inventor profile of:

Michael Rumer

City:

Santa Clara, California

Country:

United States

Published Applications:

7

Last publication date:

2025-09-25

Top Assignees for applications by Michael Rumer

The entities that hold a legal rights for patent applications filed by inventor Rumer Michael:

  • LAM RESEARCH CORPORATION 5 Fremont, CA United States
  • Novellus Systems Inc. 1 San Jose, CA United States

Recent patent applications by Rumer Michael

Michael Rumer from Santa Clara, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2025-09-25
US20250297362A1
Chemistry; metallurgy

GAS SUPPLY LINE ARRANGEMENTS

#2 | 2025-01-16
US20250019830A1
Chemistry; metallurgy

PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCESSING

#3 | 2021-07-29
US20210230749A1
Chemistry; metallurgy

Preventing deposition on pedestal in semiconductor substrate processing

#4 | 2019-04-25
US20190120775A1
Physics

In-situ chamber clean end point detection systems and methods using computer vision systems

#5 | 2018-02-01
US20180033672A1
Electricity

Substrate support with increasing areal density and corresponding method of fabricating

#6 | 2016-02-04
US20160035569A1
Electricity

Physical vapor deposition of low-stress nitrogen-doped tungsten films

#7 | 2006-05-02
US9675627
-

PVD deposition process for enhanced properties of metal films

InventorID:

1434688 ⎘

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