Eindhoven
Netherlands
11
2021-03-04
The entities that hold a legal rights for patent applications filed by inventor GOORMAN Koen:
Koen GOORMAN from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus and device manufacturing method involving a heater
#2 | 2019-08-01Lithographic apparatus and device manufacturing method involving a heater
#3 | 2016-02-18Lithographic apparatus and device manufacturing method involving a heater
#4 | 2012-05-10Lithographic apparatus and device manufacturing method involving a heater
#5 | 2010-12-23Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor
#6 | 2007-03-15Method of calibrating a lithographic apparatus and device manufacturing method
#7 | 2007-03-08Lithographic method
#8 | 2006-06-08Calibration substrate and method for calibrating a lithographic apparatus
#9 | 2006-04-27Lithographic apparatus and device manufacturing method
#10 | 2006-02-16Lithographic apparatus and device manufacturing method having liquid evaporation control
#11 | 2006-02-16Lithographic apparatus and device manufacturing method
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