Milpitas, California
United States
13
2026-02-12
The entities that hold a legal rights for patent applications filed by inventor SRINIVASAN Sunil:
Sunil SRINIVASAN from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:
SYSTEMS AND METHODS FOR CONTROLLING A VOLTAGE WAVEFORM AT A SUBSTRATE DURING PLASMA PROCESSING
#2 | 2019-11-14Method of controlling ion energy distribution using a pulse generator with a current-return output stage
#3 | 2019-07-25PROCESSING WITH POWERED EDGE RING
#4 | 2018-11-01Adjustable extended electrode for edge uniformity control
#5 | 2018-08-16Adjustable extended electrode for edge uniformity control
#6 | 2018-08-02Adjustable extended electrode for edge uniformity control
#7 | 2018-04-17Adjustable extended electrode for edge uniformity control
#8 | 2017-12-14SYSTEMS AND METHODS FOR CONTROLLING A VOLTAGE WAVEFORM AT A SUBSTRATE DURING PLASMA PROCESSING
#9 | 2017-09-07Universal process kit
#10 | 2017-07-27Wafer edge ring lifting solution
#11 | 2016-02-25COMPONENT FOR SEMICONDUCTOR PROCESS CHAMBER HAVING SURFACE TREATMENT TO REDUCE PARTICLE EMISSION
#12 | 2011-02-24Multi-film stack etching with polymer passivation of an overlying etched layer
#13 | 2009-07-02Shallow trench isolation etch process
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