Meerbusch
Germany
13
2026-05-21
The entities that hold a legal rights for patent applications filed by inventor Kubis Michael:
Michael Kubis from Meerbusch, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
MULTISCALE PHYSICAL ETCH MODELING AND METHODS THEREOF
#2 | 2023-09-21MULTISCALE PHYSICAL ETCH MODELING AND METHODS THEREOF
#3 | 2023-01-19METROLOGY METHOD, TARGET AND SUBSTRATE
#4 | 2022-02-24Metrology method, target and substrate
#5 | 2022-01-27METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
#6 | 2021-08-19Metrology method, patterning device, apparatus and computer program
#7 | 2020-11-05Metrology method, target and substrate
#8 | 2020-04-09Metrology method, patterning device, apparatus and computer program
#9 | 2019-11-14Metrology method, target and substrate
#10 | 2018-12-20Determining edge roughness parameters
#11 | 2018-10-25Method and apparatus to correct for patterning process error
#12 | 2018-03-08Method and apparatus for inspection and metrology
#13 | 2016-03-03Metrology method, target and substrate
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