Burghausen
Germany
18
2020-03-19
The entities that hold a legal rights for patent applications filed by inventor Buschhardt Thomas:
Thomas Buschhardt from Burghausen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Separating apparatus for polysilicon
#2 | 2018-07-05Screen plate for screening plants for mechanical classification of polysilicon
#3 | 2013-07-25Method for polishing a semiconductor wafer
#4 | 2013-03-21Method for the treatment of a semiconductor wafer
#5 | 2012-10-04Process Module for the Inline-Treatment of Substrates
#6 | 2011-10-06Method for the double-side polishing of a semiconductor wafer
#7 | 2011-04-28Method for producing a semiconductor wafer
#8 | 2011-04-28METHOD FOR POLISHING A SEMICONDUCTOR WAFER
#9 | 2010-11-18Method for producing a wafer comprising a silicon single crystal substrate having a front and a back side and a layer of SiGe deposited on the front side
#10 | 2010-06-10Method for the treatment of a semiconductor wafer
#11 | 2009-06-11Method for the wet-chemical treatment of a semiconductor wafer
#12 | 2009-03-19PROCESS FOR CLEANING A SEMICONDUCTOR WAFER
#13 | 2009-01-29Method for polishing a substrate composed of semiconductor material
#14 | 2009-01-08Process for cleaning a semiconductor wafer using a cleaning solution
#15 | 2008-12-18Process for cleaning, drying and hydrophilizing a semiconductor wafer
#16 | 2008-10-30Methods for the single-sided polishing of semiconductor wafers and semiconductor wafer having a relaxed Si1-x GEx Layer
#17 | 2007-11-08Method for producing a layer structure
#18 | 2007-01-25Method for machining a semiconductor wafer on both sides in a carrier, carrier, and a semiconductor wafer produced by the method
146050 ⎘