Assignee profile:

SILTRONIC AG

City:

Munich

Country:

Germany

Published Applications:

360

Last publication date:

2025-09-11

Patent Grants:

303

Last grant date:

2026-05-19

Quarterly SILTRONIC AG Patent Applications

Top Inventors for applications by SILTRONIC AG

These are the the leading inventors for applications assigned to SILTRONIC AG:

Recent patent applications by SILTRONIC AG

SILTRONIC AG based in Munich, DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2025-09-11
US20250283249A1
Chemistry; metallurgy

SEMICONDUCTOR WAFER MADE OF SINGLE-CRYSTAL SILICON AND PROCESS FOR THE PRODUCTION THEREOF

#2 | 2025-06-19 ✅ Patent 12,635,442 granted on 2026-05-19
US20250201547A1
Electricity

METHOD FOR CLEANING A SEMICONDUCTOR WAFER

#3 | 2024-09-19 ✅ Patent 12,637,786 granted on 2026-05-26
US20240309552A1
Chemistry; metallurgy

METHOD FOR PRODUCING A GALLIUM OXIDE LAYER ON A SUBSTRATE

#4 | 2024-07-25 ✅ Patent 12,479,128 granted on 2025-11-25
US20240246260A1
Performing operations; transporting

METHOD FOR PRODUCING SEMICONDUCTOR WAFERS USING A WIRE SAW, WIRE SAW, AND SEMICONDUCTOR WAFERS MADE OF MONOCRYSTALLINE SILICON

#5 | 2024-05-30 ✅ Patent 12,308,267 granted on 2025-05-20
US20240178026A1
Electricity

Apparatus for transporting semiconductor wafers

#6 | 2024-05-09 ✅ Patent 12,503,791 granted on 2025-12-23
US20240150932A1
Chemistry; metallurgy

METHOD OF PRODUCING EPITAXIAL LAYER WAFERS IN A CHAMBER OF A DEPOSITION REACTOR

#7 | 2024-05-09 ✅ Patent 12,553,145 granted on 2026-02-17
US20240150927A1
Chemistry; metallurgy

APPARATUS AND METHOD FOR PRODUCING A DOPED MONOCRYSTALLINE ROD MADE OF SILICON

#8 | 2024-04-25 ✅ Patent 12,532,714 granted on 2026-01-20
US20240136173A1
Electricity

METHOD FOR PRODUCING DISCS FROM A CYLINDRICAL ROD MADE OF A SEMICONDUCTOR MATERIAL

#9 | 2024-03-28 ✅ Patent 12,550,680 granted on 2026-02-10
US20240105523A1
Electricity

METHOD FOR TESTING THE STRESS ROBUSTNESS OF A SEMICONDUCTOR SUBSTRATE

#10 | 2024-01-18 ✅ Patent 12,532,700 granted on 2026-01-20
US20240021449A1
Electricity

METHOD FOR DEPOSITING AN EPITAXIAL LAYER ON A SUBSTRATE WAFER

#11 | 2023-12-28 ✅ Patent 12,596,062 granted on 2026-04-07
US20230417644A1
Physics

METHOD FOR CLASSIFYING UNKNOWN PARTICLES ON A SURFACE OF A SEMI-CONDUCTOR WAFER

#12 | 2023-10-19 ✅ Patent 12,104,274 granted on 2024-10-01
US20230332323A1
Chemistry; metallurgy

Method and device for producing a single crystal of silicon, which single crystal is doped with n-type dopant

#13 | 2023-10-12 ✅ Patent 12,437,989 granted on 2025-10-07
US20230326750A1
Electricity

METHOD FOR DEPOSITING A SILICON GERMANIUM LAYER ON A SUBSTRATE

#14 | 2023-10-05 ✅ Patent 12,311,577 granted on 2025-05-27
US20230311363A1
Performing operations; transporting

Method and apparatus for simultaneously slicing a multiplicity of slices from a workpiece

#15 | 2023-09-14
US20230287569A1
Chemistry; metallurgy

APPARATUS AND METHOD FOR DEPOSITING A LAYER OF SEMICONDUCTOR MATERIAL ON A SUBSTRATE WAFER

#16 | 2023-09-14
US20230287566A1
Chemistry; metallurgy

METHOD AND APPARATUS FOR PRODUCING A GAS CURTAIN OF PURGE GAS IN A SLIT VALVE TUNNEL

#17 | 2023-09-14 ✅ Patent 12,275,079 granted on 2025-04-15
US20230286067A1
Performing operations; transporting

Method for separating a plurality of slices from workpieces by means of a wire saw during a sequence of separation processes

#18 | 2023-09-07 ✅ Patent 12,311,455 granted on 2025-05-27
US20230278118A1
Performing operations; transporting

Method for separating a plurality of slices from workpieces by means of a wire saw during a sequence of separation processes

#19 | 2023-09-07
US20230278111A1
Performing operations; transporting

METHOD FOR PRODUCING A VACUUM GRIPPER FOR SEMICONDUCTOR WORKPIECES, AND VACUUM GRIPPER

#20 | 2023-08-24 ✅ Patent 12,331,424 granted on 2025-06-17
US20230265581A1
Chemistry; metallurgy

METHOD FOR DEPOSITING AN EPITAXIAL LAYER ON A SUBSTRATE WAFER

#21 | 2023-08-17 ✅ Patent 12,378,693 granted on 2025-08-05
US20230257906A1
Chemistry; metallurgy

CRYSTAL PIECE OF MONOCRYSTALLINE SILICON

#22 | 2023-08-03 ✅ Patent 12,497,710 granted on 2025-12-16
US20230243069A1
Chemistry; metallurgy

METHOD FOR PRODUCING SEMICONDUCTOR WAFERS

#23 | 2023-07-27 ✅ Patent 12,378,692 granted on 2025-08-05
US20230235479A1
Chemistry; metallurgy

SEMICONDUCTOR WAFER MADE OF SINGLE-CRYSTAL SILICON AND PROCESS FOR THE PRODUCTION THEREOF

#24 | 2023-07-27 ✅ Patent 12,479,129 granted on 2025-11-25
US20230234261A1
Performing operations; transporting

METHOD FOR SEPARATING A PLURALITY OF SLICES FROM WORKPIECES BY MEANS OF A WIRE SAW DURING A SEQUENCE OF SEPARATION PROCESSES

#25 | 2023-07-27 ✅ Patent 12,251,767 granted on 2025-03-18
US20230234149A1
Performing operations; transporting

Method for separating a plurality of slices from workpieces by means of a wire saw during a sequence of separation processes

#26 | 2023-07-20 ✅ Patent 12,325,081 granted on 2025-06-10
US20230226629A1
Performing operations; transporting

METHOD FOR SEPARATING A PLURALITY OF SLICES FROM WORKPIECES BY MEANS OF A WIRE SAW DURING A SEQUENCE OF SEPARATION PROCESSES

#27 | 2023-06-08
US20230178398A1
Electricity

METHOD AND DEVICE FOR DEPOSITING AN EPITAXIAL LAYER ON A SUBSTRATE WAFER MADE OF SEMICONDUCTOR MATERIAL

#28 | 2023-06-01 ✅ Patent 12,381,074 granted on 2025-08-05
US20230170206A1
Electricity

METHOD, CONTROL SYSTEM, AND SYSTEM FOR MACHINING A SEMICONDUCTOR WAFER, AND SEMICONDUCTOR WAFER

#29 | 2023-04-13 ✅ Patent 12,227,870 granted on 2025-02-18
US20230109724A1
Chemistry; metallurgy

Fused quartz crucible for producing silicon crystals, and method for producing a fused quartz crucible

#30 | 2023-02-16 ✅ Patent 12,558,731 granted on 2026-02-24
US20230050459A1
Performing operations; transporting

METHOD FOR SEPARATING MULTIPLE SLICES OF WORKPIECES BY MEANS OF A WIRE SAW DURING A SEQUENCE OF SEPARATION PROCESSES

#31 | 2023-01-19 ✅ Patent 12,598,938 granted on 2026-04-07
US20230016276A1
Electricity

DEVICE FOR DRYING SEMICONDUCTOR SUBSTRATES

#32 | 2023-01-12 ✅ Patent 12,635,445 granted on 2026-05-19
US20230008740A1
Electricity

DEVICE FOR DRYING SEMICONDUCTOR SUBSTRATES

#33 | 2022-11-10 ✅ Patent 12,480,225 granted on 2025-11-25
US20220356601A1
Chemistry; metallurgy

METHOD FOR PRODUCING SEMICONDUCTOR WAFERS FROM SILICON

#34 | 2022-11-03 ✅ Patent 11,639,558 granted on 2023-05-02
US20220349089A1
Chemistry; metallurgy

Method for producing a semiconductor wafer composed of monocrystalline silicon

#35 | 2022-11-03 ✅ Patent 12,116,694 granted on 2024-10-15
US20220349086A1
Chemistry; metallurgy

Device and method for pulling a single crystal of semiconductor material

#36 | 2022-10-13 ✅ Patent 11,621,330 granted on 2023-04-04
US20220328636A1
Electricity

Semiconductor wafer of monocrystalline silicon and method of producing the semiconductor wafer

#37 | 2022-09-22 ✅ Patent 11,905,617 granted on 2024-02-20
US20220298670A1
Chemistry; metallurgy

Method for producing semiconductor wafers of monocrystalline silicon by pulling a single silicon crystal from a melt contained in a crucible and continually changing the rotational direction of the crucible

#38 | 2022-08-25 ✅ Patent 11,982,015 granted on 2024-05-14
US20220267926A1
Chemistry; metallurgy

Method for depositing an epitaxial layer on a front side of a semiconductor wafer, and device for carrying out the method

#39 | 2022-08-18 ✅ Patent 12,359,342 granted on 2025-07-15
US20220259762A1
Chemistry; metallurgy

METHOD FOR PULLING A SINGLE CRYSTAL OF SILICON IN ACCORDANCE WITH THE CZOCHRALSKI METHOD

#40 | 2022-08-18
US20220258303A1
Performing operations; transporting

INSTALLATION AND METHOD FOR POLISHING SEMICONDUCTOR WAFERS

#41 | 2022-07-28 ✅ Patent 12,313,578 granted on 2025-05-27
US20220236205A1
Physics

Method for producing semiconductor wafers

#42 | 2022-07-28
US20220234250A1
Performing operations; transporting

METHOD FOR SEPARATING A PLURALITY OF SLICES FROM WORKPIECES DURING A NUMBER OF SEPARATING PROCESSES BY MEANS OF A WIRE SAW, AND SEMICONDUCTOR WAFER MADE OF MONOCRYSTALLINE SILICON

#43 | 2022-03-17
US20220080549A1
Performing operations; transporting

METHOD FOR POLISHING A SEMICONDUCTIOR WAFER

#44 | 2022-02-10
US20220040883A1
Performing operations; transporting

METHOD FOR PRODUCING SEMICONDUCTOR WAFERS BY MEANS OF A WIRE SAW

#45 | 2022-02-10 ✅ Patent 12,083,705 granted on 2024-09-10
US20220040882A1
Performing operations; transporting

Method for producing semiconductor wafers using a wire saw, wire saw, and semiconductor wafers made of monocrystalline silicon

#46 | 2021-12-02 ✅ Patent 11,482,597 granted on 2022-10-25
US20210376088A1
Electricity

Semiconductor wafer having epitaxial layer

#47 | 2021-11-18 ✅ Patent 11,658,022 granted on 2023-05-23
US20210358737A1
Electricity

Method, control system, and system for machining a semiconductor wafer, and semiconductor wafer

#48 | 2021-11-04 ✅ Patent 11,598,020 granted on 2023-03-07
US20210340690A1
Chemistry; metallurgy

Device for pulling a single crystal of semiconductor material out of a melt using the CZ method, and method using the device

#49 | 2021-07-22 ✅ Patent 11,788,201 granted on 2023-10-17
US20210222319A1
Chemistry; metallurgy

Method for producing a single crystal from semiconductor material by the FZ method; device for carrying out the method and semiconductor silicon wafer

#50 | 2021-04-15 ✅ Patent 11,972,986 granted on 2024-04-30
US20210111080A1
Electricity

Process for producing semiconductor wafers

#51 | 2021-03-25 ✅ Patent 11,578,424 granted on 2023-02-14
US20210087705A1
Chemistry; metallurgy

Epitaxially coated semiconductor wafer of monocrystalline silicon and method for production thereof

#52 | 2020-11-19 ✅ Patent 10,991,614 granted on 2021-04-27
US20200365443A1
Electricity

Susceptor for holding a semiconductor wafer with an orientation notch during the deposition of a layer on a front side of the semiconductor wafer and method for depositing the layer by using the susceptor

#53 | 2020-10-08 ✅ Patent 10,982,324 granted on 2021-04-20
US20200318234A1
Chemistry; metallurgy

Method and device for producing coated semiconductor wafers

#54 | 2020-09-17 ✅ Patent 11,538,683 granted on 2022-12-27
US20200294794A1
Electricity

Method for depositing an epitaxial layer on a front side of a semiconductor wafer and device for carrying out the method

#55 | 2020-08-27 ✅ Patent 11,390,962 granted on 2022-07-19
US20200270764A1
Chemistry; metallurgy

Single crystal of silicon with <100> orientation, which is doped with n-type dopant, and method for producing such a single crystal

#56 | 2020-07-30 ✅ Patent 10,961,640 granted on 2021-03-30
US20200240039A1
Chemistry; metallurgy

Semiconductor wafer composed of single-crystal silicon with high gate oxide breakdown, and a process for the manufacture thereof

#57 | 2020-06-25 ✅ Patent 11,869,942 granted on 2024-01-09
US20200203485A1
Electricity

Heteroepitaxial wafer and method for producing a heteroepitaxial wafer

#58 | 2020-05-28 ✅ Patent 11,417,733 granted on 2022-08-16
US20200168712A1
Electricity

Semiconductor wafer of monocrystalline silicon and method of producing the semiconductor wafer

#59 | 2020-05-28 ✅ Patent 11,280,026 granted on 2022-03-22
US20200165745A1
Chemistry; metallurgy

Semiconductor wafer made of single-crystal silicon and process for the production thereof

#60 | 2020-05-14 ✅ Patent 10,731,271 granted on 2020-08-04
US20200149184A1
Chemistry; metallurgy

Silicon wafer with homogeneous radial oxygen variation

#61 | 2020-05-14 ✅ Patent 10,988,856 granted on 2021-04-27
US20200149183A1
Chemistry; metallurgy

Method for pulling a single crystal by the FZ method comprising reducing the power of a melting apparatus based on geometrical dimensions of the drop

#62 | 2020-05-07 ✅ Patent 10,907,271 granted on 2021-02-02
US20200141025A1
Chemistry; metallurgy

Method for pulling a single crystal by the FZ method comprising dynamically adapting the power of a melting apparatus based on a position of lower and upper phase boundaries

#63 | 2020-04-23 ✅ Patent 11,158,549 granted on 2021-10-26
US20200126876A1
Electricity

Method, control system and plant for processing a semiconductor wafer, and semiconductor wafer

#64 | 2020-03-19 ✅ Patent 11,154,908 granted on 2021-10-26
US20200086348A1
Performing operations; transporting

Separating apparatus for polysilicon

#65 | 2020-02-06 ✅ Patent 11,161,217 granted on 2021-11-02
US20200039020A1
Performing operations; transporting

Method for polishing a semiconductor wafer on both sides

#66 | 2020-01-16 ✅ Patent 11,878,359 granted on 2024-01-23
US20200016671A1
Performing operations; transporting

Wire saw, wire guide roll and method for simultaneously cutting a multiplicity of wafers from an ingot

#67 | 2019-11-21 ✅ Patent 11,021,808 granted on 2021-06-01
US20190352795A1
Chemistry; metallurgy

Method and apparatus for pulling a single crystal by the FZ method

#68 | 2019-11-14 ✅ Patent 11,060,202 granted on 2021-07-13
US20190345630A1
Chemistry; metallurgy

Method for pulling a single crystal composed of semiconductor material from a melt contained in a crucible

#69 | 2019-10-10 ✅ Patent 11,302,565 granted on 2022-04-12
US20190311941A1
Electricity

Device for handling a semiconductor wafer in an epitaxy reactor and method for producing a semiconductor wafer having an epitaxial layer

#70 | 2019-05-09 ✅ Patent 10,844,513 granted on 2020-11-24
US20190136404A1
Chemistry; metallurgy

Method for producing a semiconductor wafer of monocrystalline silicon, device for producing a semiconductor wafer of monocrystalline silicon and semiconductor wafer of monocrystalline

#71 | 2019-04-11 ✅ Patent 10,865,499 granted on 2020-12-15
US20190106809A1
Chemistry; metallurgy

Susceptor for holding a semiconductor wafer, method for depositing an epitaxial layer on a front side of a semiconductor wafer, and semiconductor wafer with epitaxial layer

#72 | 2019-02-14 ✅ Patent 10,861,704 granted on 2020-12-08
US20190051534A1
Electricity

Method for the vapour phase etching of a semiconductor wafer for trace metal analysis

#73 | 2019-01-03
US20190006190A1
Electricity

FZ SILICON AND METHOD TO PREPARE FZ SILICON

#74 | 2018-12-27 ✅ Patent 10,844,515 granted on 2020-11-24
US20180371639A1
Chemistry; metallurgy

Semiconductor wafer made of monocrystalline silicon, and method for producing same

#75 | 2018-12-20 ✅ Patent 10,961,638 granted on 2021-03-30
US20180363165A1
Chemistry; metallurgy

Method for epitaxially coating semiconductor wafers, and semiconductor wafer

#76 | 2018-12-20 ✅ Patent 10,738,392 granted on 2020-08-11
US20180363163A1
Chemistry; metallurgy

Method for determining and regulating a diameter of a single crystal during pulling of the single crystal

#77 | 2018-11-29 ✅ Patent 11,075,070 granted on 2021-07-27
US20180342383A1
Electricity

Monocrystalline semiconductor wafer and method for producing a semiconductor wafer

#78 | 2018-10-04 ✅ Patent 10,597,795 granted on 2020-03-24
US20180282900A1
Chemistry; metallurgy

Method for producing a semiconductor wafer with epitaxial layer in a deposition chamber, apparatus for producing a semiconductor wafer with epitaxial layer, and semiconductor wafer with epitaxial layer

#79 | 2018-07-26 ✅ Patent 11,380,621 granted on 2022-07-05
US20180211923A1
Electricity

Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer

#80 | 2018-07-12
US20180194633A1
Chemistry; metallurgy

METHOD FOR THE THERMAL TREATMENT OF GRANULAR MATERIAL COMPOSED OF SILICON, GRANULAR MATERIAL COMPOSED OF SILICON, AND METHOD FOR PRODUCING A MONOCRYSTAL COMPOSED OF SILICON

#81 | 2018-07-05 ✅ Patent 11,059,072 granted on 2021-07-13
US20180185882A1
Performing operations; transporting

Screen plate for screening plants for mechanical classification of polysilicon

#82 | 2018-02-15 ✅ Patent 10,483,128 granted on 2019-11-19
US20180047586A1
Electricity

Epitaxially coated semiconductor wafer, and method for producing an epitaxially coated semiconductor wafer

#83 | 2017-12-28 ✅ Patent 10,283,356 granted on 2019-05-07
US20170372888A1
Electricity

Semiconductor wafer comprising a monocrystalline group-IIIA nitride layer

#84 | 2017-07-06 ✅ Patent 10,249,493 granted on 2019-04-02
US20170194137A1
Electricity

Method for depositing a layer on a semiconductor wafer by vapor deposition in a process chamber

#85 | 2017-04-27 ✅ Patent 9,991,208 granted on 2018-06-05
US20170117228A1
Electricity

Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer

#86 | 2016-08-18 ✅ Patent 10,137,483 granted on 2018-11-27
US20160236242A1
Performing operations; transporting

Ultrasonic cleaning method

#87 | 2016-08-11 ✅ Patent 9,923,050 granted on 2018-03-20
US20160233293A1
Electricity

Semiconductor wafer and a method for producing the semiconductor wafer

#88 | 2016-07-14 ✅ Patent 11,148,250 granted on 2021-10-19
US20160199964A1
Performing operations; transporting

Method for dressing polishing pads

#89 | 2016-03-03 ✅ Patent 10,094,042 granted on 2018-10-09
US20160060786A1
Chemistry; metallurgy

Method of supporting a growing single crystal during crystallization of the single crystal according to the FZ method

#90 | 2016-02-25 ✅ Patent 9,662,687 granted on 2017-05-30
US20160052025A1
Performing operations; transporting

Ultrasonic cleaning method

#91 | 2016-02-11 ✅ Patent 9,835,567 granted on 2017-12-05
US20160041107A1
Physics

Method for monitoring the operational state of a surface inspection system for detecting defects on the surface of semiconductor wafers

#92 | 2015-12-10 ✅ Patent 9,828,693 granted on 2017-11-28
US20150354087A1
Chemistry; metallurgy

Apparatus and process for producing a crystal of semiconductor material

#93 | 2015-11-12 ✅ Patent 9,230,798 granted on 2016-01-05
US20150325433A1
Electricity

Semiconductor wafer composed of silicon and method for producing same

#94 | 2015-11-05 ✅ Patent 9,573,296 granted on 2017-02-21
US20150314484A1
Performing operations; transporting

Method for simultaneously cutting a multiplicity of slices of particularly uniform thickness from a workpiece

#95 | 2015-10-22 ✅ Patent 9,691,632 granted on 2017-06-27
US20150303071A1
Electricity

Epitaxial wafer and a method of manufacturing thereof

#96 | 2015-10-15 ✅ Patent 9,828,692 granted on 2017-11-28
US20150292109A1
Chemistry; metallurgy

Apparatus and process for producing a single crystal of silicon

#97 | 2015-10-08 ✅ Patent 9,579,826 granted on 2017-02-28
US20150283727A1
Performing operations; transporting

Method for slicing wafers from a workpiece using a sawing wire

#98 | 2015-07-23 ✅ Patent 9,932,690 granted on 2018-04-03
US20150203987A1
Chemistry; metallurgy

Device for producing a monocrystal by crystallizing said monocrystal in a melting area

#99 | 2015-06-11 ✅ Patent 9,662,804 granted on 2017-05-30
US20150158203A1
Performing operations; transporting

Method for slicing wafers from a workpiece by means of a wire saw

#100 | 2015-03-26 ✅ Patent 9,333,673 granted on 2016-05-10
US20150083104A1
Performing operations; transporting

Method for simultaneously cutting a multiplicity of wafers from a workpiece

Also check out SILTRONIC AG's (Munich, Germany) applicant profile with 133 patent applications submitted.

AssigneeID:

3264 ⎘