San Jose, California
United States
8
2021-10-07
The entities that hold a legal rights for patent applications filed by inventor BA Xiaolan:
Xiaolan BA from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Multi-layer feature fill
#2 | 2018-08-23Forming low resistivity fluorine free tungsten film without nucleation
#3 | 2017-04-27Method of forming low resistivity fluorine free tungsten film without nucleation
#4 | 2016-12-01Tungsten films having low fluorine content
#5 | 2016-12-01Deposition of low fluorine tungsten by sequential CVD process
#6 | 2016-03-10Enhancing electrical property and UV compatibility of ultrathin blok barrier film
#7 | 2016-01-14ENHANCING UV COMPATIBILITY OF LOW K BARRIER FILM
#8 | 2014-09-18Cu/barrier interface enhancement
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