Bielefeld
Germany
8
2014-06-26
The entities that hold a legal rights for patent applications filed by inventor Bowering Norbert R.:
Norbert R. Bowering from Bielefeld, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
EUV optics
#2 | 2014-04-10Harsh environment optical element protection
#3 | 2013-12-05Drive laser for EUV light source
#4 | 2013-03-21EUV light source components and methods for producing, using and refurbishing same
#5 | 2011-03-31EUV optics
#6 | 2011-03-10Drive laser for EUV light source
#7 | 2010-02-04Systems and methods for heating an EUV collector mirror
#8 | 2009-09-17Systems and methods for target material delivery in a laser produced plasma EUV light source
149961 ⎘