Kumamoto
Japan
5
2022-05-19
The entities that hold a legal rights for patent applications filed by inventor Kitano Junichi:
Junichi Kitano from Kumamoto, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#2 | 2019-12-19Substrate processing apparatus and processing liquid reuse method
#3 | 2016-04-21Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing program
#4 | 2010-03-25Coating film forming apparatus and coating film forming method for immersion light exposure
#5 | 2007-05-03Developing method and developing apparatus
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